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Fabrication method for carbon/nickel oxide/nickel patterned microelectrode

A preparation process and nickel oxide technology, which is applied in the manufacture of hybrid/electric double-layer capacitors, hybrid capacitor electrodes, etc., can solve the problems of inability to realize carbon/nickel oxide composite micro-devices and micro-systems, and incompatibility of micro-machining processes. Achieve the effect of clear and complete fine structure, improved electrochemical capacity, and complete pattern

Inactive Publication Date: 2016-07-27
WUHAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the existing mainstream pyrolytic carbon-nickel oxide composite materials preparation methods are not compatible with the micromachining process, and it is impossible to realize carbon / nickel oxide composite micro-devices and microsystems.

Method used

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  • Fabrication method for carbon/nickel oxide/nickel patterned microelectrode
  • Fabrication method for carbon/nickel oxide/nickel patterned microelectrode
  • Fabrication method for carbon/nickel oxide/nickel patterned microelectrode

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] A carbon / nickel oxide / nickel patterned microelectrode manufacturing process, comprising the following steps:

[0041] 1. Synthesis of hollow nickel oxide nanospheres:

[0042] 1) Dissolve 0.8 g of glucose in 80 mL of deionized water in a beaker, and stir to obtain a transparent solution; dropwise add 1M sodium hydroxide solution therein, adjust the pH to 8, and obtain a mixed solution I;

[0043] 2) Heat the mixed liquid I in a water bath to 80°C for 3 hours, and transfer it to the inner lining of a polytetrafluoroethylene high-temperature and high-pressure reactor with a capacity of 100mL, assemble the inner lining of the high-temperature and high-pressure reactor with the outer stainless steel lining, and then place Heat and keep it in an oven at 180°C for 5h, then wash the obtained reaction product I (multiple washes with a mixed solution of deionized water and absolute ethanol), centrifuge and dry (dry at 60°C for 12h), to obtain a solid product I;

[0044] 3) Weig...

Embodiment 2

[0057] A carbon / nickel oxide / nickel patterned microelectrode manufacturing process, comprising the following steps:

[0058] 1. Synthesis of hollow nickel oxide nanospheres:

[0059] 1) Dissolve 0.8 g of glucose in 80 mL of deionized water in a beaker, and stir to obtain a transparent solution; dropwise add 1M sodium hydroxide solution therein, adjust the pH to 7.5, and obtain a mixed solution I;

[0060] 2) Heat the mixed liquid I in a water bath to 70°C for 3 hours, and transfer it to the inner lining of a polytetrafluoroethylene high-temperature and high-pressure reactor with a capacity of 100mL, assemble the inner lining of the high-temperature and high-pressure reactor with the stainless steel outer lining, and then place Heat and keep it in an oven at 160°C for 5 hours, then wash the obtained reaction product I (multiple washes with a mixed solution of deionized water and absolute ethanol), centrifuge and dry (dry at 60°C for 12 hours), to obtain a solid product I;

[0...

Embodiment 3

[0074] A carbon / nickel oxide / nickel patterned microelectrode manufacturing process, comprising the following steps:

[0075] 1. Synthesis of hollow nickel oxide nanospheres:

[0076] 1) Dissolve 0.8 g of glucose in 80 mL of deionized water in a beaker, and stir to obtain a transparent solution; dropwise add 1M sodium hydroxide solution therein, adjust the pH to 8.5, and obtain a mixed solution I;

[0077] 2) Heat the mixed liquid I in a water bath to 80°C for 4 hours, and transfer it to the inner lining of a polytetrafluoroethylene high-temperature and high-pressure reactor with a capacity of 100mL, and assemble the inner lining of the high-temperature and high-pressure reactor with the stainless steel outer lining, and then place Heating and heat preservation in an oven at 170°C for 6h, and then washing the obtained reaction product I (multiple washings with a mixed solution of deionized water and absolute ethanol), centrifuging and drying (drying at 60°C for 12h), to obtain ...

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Abstract

The invention discloses a fabrication method for a carbon / nickel oxide / nickel patterned microelectrode. The fabrication method comprises the following steps of 1) synthesizing a hollow nickel oxide nanosphere; 2) patterning a photoresist-nickel oxide nanosphere composite material microelectrode, carrying out mechanical stirring and ultrasonic processing on the hollow nickel oxide nanosphere and photoresist, applying the obtained mixture onto an electrode substrate, and carrying out photoetching, developing and rinsing; and 3) carrying out high-temperature pyrolysis on the microelectrode. Photo-induced corrosion resistance of the photoresist is creatively utilized, light sensitive resin in the photoresist is taken as a carbon source and is combined with the hollow nickel oxide nanosphere synthesized by a hydrothermal method to prepare the carbon / nickel oxide / nickel patterned microelectrode, so that the purpose of micro-electrical polarization of a pyrolytic carbon-nickel oxide composite material is achieved; and moreover, the obtained microelectrode represents favorable electrochemical performance and mechanical performance, and is wide in application prospect.

Description

technical field [0001] The invention belongs to the intersection field of nanometer material and micromachining technology, and specifically relates to a preparation technology based on a novel carbon / nickel oxide / nickel patterned microelectrode. Background technique [0002] Micro-Electro-Mechanical System (MEMS, Micro-Electro-Mechanical System) developed on the basis of micro-nano technology is widely used in various fields of society. It has been widely studied and applied to various micro devices and their systems because of its characteristics of control and repeatability. Nickel oxide is widely used in electrochemical supercapacitors as a substitute for ruthenium dioxide because of its large theoretical capacity, low price, and environmental friendliness. At present, the existing mainstream pyrolytic carbon-nickel oxide composite preparation methods are not compatible with micromachining processes, and cannot realize carbon / nickel oxide composite microdevices and micr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01G11/86H01G11/46
CPCY02E60/13H01G11/86H01G11/46
Inventor 何亮杨艳娟麦立强
Owner WUHAN UNIV OF TECH