Apparatus for producing fine particles and method for producing fine particles
A technology for manufacturing devices and manufacturing methods, which is applied in the field of particle manufacturing devices, and can solve problems such as poor particle size distribution, larger average particle size of particles, and increased production of particles
Active Publication Date: 2016-07-27
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
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- Abstract
- Description
- Claims
- Application Information
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Problems solved by technology
Therefore, larger particles are formed, and the average particle size of the generated particles becomes larger and the particle size distribution becomes worse.
In addition, if the desired average particle size is to be obtained, the input amount of materials has to be limited, and it is difficult to increase the production amount of fine particles.
Method used
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no. 1 approach
[0048] figure 1 It is a schematic longitudinal sectional view showing the microparticle manufacturing apparatus according to the first embodiment. figure 2 A schematic cross-sectional plan view showing a state in which the electrode portion is cut in the lateral direction in the microparticle manufacturing apparatus according to the first embodiment. image 3 It is a schematic enlarged cross-sectional view showing the microparticle manufacturing apparatus according to the first embodiment. use Figure 1 ~ Figure 3 , an example of producing nanoscale particles of silicon will be described as an example.
[0049] The microparticle manufacturing apparatus related to the first embodiment is configured to include at least a reaction chamber 1 as an example of a vacuum chamber, a material supply device 10, a plurality of electrodes 4 for generating arc discharge, and a recovery unit for recovering generated microparticles. Particle recovery unit 3 as an example of the device. ...
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Abstract
An apparatus and a method for producing fine particles capable of increasing the production and producing fine particles at low costs by feeding a large quantity of material efficiently into the plasma. The apparatus includes a vacuum chamber (1), a material feeding device (10) connected to the vacuum chamber and feeding material particles (30) into the vacuum chamber from material feeing ports (12), a plurality of electrodes (4) connected to the vacuum chamber, tip ends of which protrude into the vacuum chamber to generate plasma (25) and a collecting device (3) connected to the vacuum chamber and collecting fine particles (31), which generates discharge inside the vacuum chamber and produces the fine particles from the material, in which the material feeding ports of the material feeding device are arranged in a lower side than the plural electrodes in the vertical direction in the vacuum chamber.
Description
technical field [0001] The present invention relates to a microparticle production apparatus and a microparticle production method used in, for example, coating materials such as film materials for food packaging, and ink materials used in wiring of electronic devices. Background technique [0002] In recent years, applications of nanoscale particles to various devices have been studied. For example, nickel metal particles are currently used in ceramic capacitors, and studies are underway to use particles with a particle size of 200 nm or less and good dispersion in next-generation ceramic capacitors. [0003] Also, silicon monoxide (SiO) with a lower oxygen content than silicon dioxide x : x = 1 to 1.6) are effectively used as an antireflection film for an optical lens or a vapor deposition material for a gas barrier film for food packaging. [0004] As a common method of producing these nano-sized particles, there are methods of introducing bulk material as a raw materia...
Claims
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IPC IPC(8): H01J37/32B01J19/08B82Y40/00C01F7/023
CPCB01J19/087B82Y40/00H01J37/32055H01J37/32743B01J2219/0898B01J2219/0809B22F1/056B22F2999/00C04B35/111C04B35/573C04B35/591C04B35/62813C04B35/62834C04B2235/5454C01F7/023C01P2004/64B22F9/14C04B35/14B22F3/003B22F2202/13
Inventor 永井久雄大熊崇文
Owner PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD