A kind of ultra-high reflectivity optical scanning vibrating mirror and its preparation method

Abstract

The invention relates to an optical scanning galvanometer of super high reflectivity, which is composed of a glass substrate layer and a highly-reflective film deposited and plated on the glass substrate layer. The highly-reflective film is composed of nine film layers, which are sequentially, according to the distance from the glass substrate layer from small to large, a first Al2O3 film layer, an Ag film layer, a second Al2O3 film layer, a first SiO2 film layer, a first high-refractivity material film layer, a second SiO2 film layer, a second high-refractivity material film layer, a third SiO2 film layer, and a third high-refractivity material film layer. The beneficial effects are as follows: the reflection bandwidth and resonance angle are increased greatly while the number of coating layers is reduced; the reflection bandwidth with the reflectivity higher than 99% is up to 300nm; and the effective resonance angle can be 0-80 degrees.

Description

technical field [0001] The invention relates to an ultra-high reflectance optical scanning vibrating mirror, in particular to a scanning vibrating mirror with large reflection bandwidth, large resonance angle, small polarization effect and corrosion resistance. Background technique [0002] The scanning galvanometer is an excellent vector scanning device. It is equipped with two mirrors (scanning mirrors). The reflection angle of the mirrors is controlled by a computer. These two mirrors can scan along the X-axis and Y-axis respectively to reach the laser beam. The deflection of the beam makes the laser focus point plotted with a certain power to mark on the material. At present, the shapes of scanning galvanometers produced by most manufacturers are circular, square or special-shaped, and their weight will affect the scanning speed and repeat positioning accuracy of the system. Existing scanning mirrors are usually gold-plated and SiO 2 Protection, because gold is soft an...

AI Technical Summary

Problems solved by technology

At present, the shapes of scanning galvanometers produced by most manufacturers are circular, square or special-shaped, and their weight will affect the scanning speed and repeat positioning accuracy of the system.

Existing scanning mirrors are usually gold-plated and SiO 2 Protection, because gold is soft and easy to scratch, and its adhesion is poor, the cost of coating is high

The existing dielectric film mirror has high reflectivity and good adhesion, but its reflection bandwidth is relatively narrow. For a single-wavelength laser, the reflection band is only 120nm when it is incident at 45 degrees, and the resonance angle can only reach plus or minus 10 degrees. Because of its polarization effect, it will change the shape of the laser spot and affect the quality of the galvanometer

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