Sub-micron scale glass subsurface defect detection device and method
A technology for subsurface defects and detection devices, which is used in measurement devices, instruments, scientific instruments, etc., can solve the problems of inability to obtain extended depth, inability to obtain local data, and high requirements for mechanical devices, and achieve detection sensitivity and signal-to-noise ratio. High detection sensitivity and signal-to-noise ratio, ensuring the effect of stability
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0048] Example 1
[0049] The supercontinuum luminescence spectrum light source 1 described in this embodiment is selected from the SC480 of Fianium, UK. The total output power of the laser is about 2w, the wavelength bandwidth is about 2000nm, and the maximum wavelength is 2400nm. The 45° cylindrical mirror 4 is NT54-092 manufactured by Edmund Optics, and its cylindrical diameter is 2 mm. Both the reference objective lens 5 and the sample objective lens 8 use Thorlabs' achromatic lens with a focal length of 10mm and a numerical aperture of 0.4. The two-dimensional scanning galvanometer 7 selects Thorlabs' GVS012 with a 10mm clear aperture. The test piece 9 is glass with sub-micron cracks on the subsurface. The transmission grating 11 is 1002-1 made by Wasatch, with a line number of 1200 and an operating wavelength of 830 nm. The focusing lens 12 is a two-inch achromatic lens from Thorlabs. The photodetector 13 selects the linear array EM2 of E2V Company.
[0050] The method f...
PUM
Property | Measurement | Unit |
---|---|---|
Wavelength | aaaaa | aaaaa |
Bandwidth | aaaaa | aaaaa |
Center wavelength | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap