Fabrication method of silicon nitride antireflection film on surface of polycrystalline solar cell

Abstract

The invention provides a polycrystalline solar cell surface silicon nitride antireflection film preparation method, which solves the technical problems that an existing solar cell is simple in structure, is easy to have continuous attenuation and is poor in product stability. The polycrystalline solar cell surface silicon nitride antireflection film preparation method comprises the following steps: a) carrying out cleaning, texturing, diffusion and etching on a crystalline silicon wafer; b) enabling the crystalline silicon wafer obtained after the step a) to pass through an ozone generation device to generate a 1-2 mm SiO2 oxidation film on the surface of the silicon wafer; c) cleaning a graphite boat through a cleaning device, placing the crystalline silicon wafer obtained after the step b) on the graphite boat, and placing the graphite boat loaded with the wafer to a tubular PECVD for pre-deposition and cleaning; d) carrying out tubular PECVD deposition on the crystalline silicon wafer obtained in the step c); and e) carrying out tubular PECVD deposition again on the crystalline silicon wafer obtained in the step d). The method has the advantages of stable and reliable product.

Description

technical field [0001] The invention belongs to the technical field of solar cells, and relates to a manufacturing method, in particular to a manufacturing method of a silicon nitride antireflection film on the surface of a polycrystalline solar cell. Background technique [0002] Research in recent years has shown that the high voltage between the circuit in the crystalline silicon photovoltaic module and its grounded metal frame will cause continuous degradation of the photovoltaic performance of the module. There are many mechanisms that cause such attenuation. For example, under the action of the above-mentioned high voltage, the ion migration phenomenon that occurs in the packaging material of the component battery and the materials of the upper surface layer and the lower surface layer of the component; the heat load that occurs in the battery The flow phenomenon; the redistribution of charges reduces the active layer of the battery; the related circuits are corroded, ...

AI Technical Summary

Problems solved by technology

[0004] Although the solar cell disclosed in this patent can make it have better light transmission, the solar cell has a simple structure, is prone to continuous attenuation, and has poor product stability. Therefore, a polycrystalline solar cell surface nitride The fabrication method of silicon anti-reflection coating is very necessary

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