A motion control system of workpiece table based on vme‑s bus

Abstract

The invention discloses a VME-S bus based working table movement control system, and belongs to the technical field of the movement control system for semiconductors and other precision mechanical equipment. The movement control system comprises a man-machine interaction unit, a VME bus machine case, a CPU main control unit, a movement control unit, an optical fiber interface unit and a synchronous exchange control unit. According to the control system, the dispatching of a RapidIO network, the Ethernet, and a synchronous timing network is completed by a synchronous exchange control card; the signal processing, data processing and other algorithms, as well as data communication are completed by a multi-core DSP movement control card in real time rapidly; and the transceiving, preprocessing and data communication of each path of the optical fiber signals are completed by an optical fiber interface card. According to the VME-S bus based working table movement control system, the multi-DSP processing function is realized by the improved movement control card; in addition, the movement control card is matched with the optical fiber interface card and the synchronous exchange control card to complete flexible application configuration of the system; and meanwhile, the movement control system has relatively high compatibility with other systems and products.

Description

technical field [0001] The invention belongs to the technical field of semiconductor equipment, and relates to a workpiece table motion control system based on a VME-S bus. Background technique [0002] Lithography machine is the core equipment of IC manufacturing industry. With the development and progress of lithography machine and its lithography technology, the control system of lithography machine workpiece table has higher and higher requirements for parallel computing, multi-sensor information fusion, complex motion control algorithm, and real-time control. The bus architecture form, bus bandwidth, system performance requirements, data processing performance, data storage capacity, real-time performance, stability, reliability and energy consumption of the corresponding control system platform put forward more stringent requirements. The bottleneck of the traditional workpiece table motion control system based on VME bus mainly lies in the bus data throughput rate, n...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the defects of poor data communication rate, insufficient real-time performance, inflexible network topology structure and low data processing rate of existing product systems, and propose a workpiece table motion control system based on VME-S bus. Meet the needs of high-efficiency real-time computing, high-speed data transmission and flexible network topology connection structure, etc.

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