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Femtosecond excimer laser ablation sampling system

A technology of excimer laser and excimer laser, which is applied in the direction of lasers, phonon exciters, laser components, etc., can solve the problems of high cost, low laser energy, poor system stability, etc., to eliminate element differentiation and ensure accurate speed, addressing stability and energy limitation issues

Inactive Publication Date: 2016-09-21
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the current femtosecond laser ablation sampling systems all use solid-state lasers to achieve femtosecond laser output, which has the disadvantages of low laser energy, poor system stability, and high cost.

Method used

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  • Femtosecond excimer laser ablation sampling system
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Embodiment Construction

[0013] Such as figure 1 , 2 As shown, a femtosecond excimer laser ablation sampling system includes a femtosecond excimer laser system, a transmission and focusing optical path 5, a laser ablation pool and a system control module 6, and the femtosecond excimer laser system includes a super Fast solid-state laser 1, coupling optical path 2, ultraviolet excimer laser 3 and synchronous control module 4, synchronous control module 4 controls synchronous triggering and delay control signals of ultra-fast solid-state laser 1 and ultraviolet excimer laser 3, the laser ablation The pool includes a sample stage 7, a sample stage control module 8, a real-time online monitoring module 9, and a detection system 10. The femtosecond ultraviolet laser output by the ultrafast solid-state laser 1 is used as a seed laser and transmitted through the coupling optical path 2 into the ultraviolet excimer laser 3. The excimer laser 3 amplifies the excimer laser energy of the seed laser, and the las...

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Abstract

The invention discloses a femtosecond excimer laser ablation sampling system, which comprises a femtosecond excimer laser system, a transporting and focusing light path, a laser ablation cell and a system control module. The femtosecond excimer laser system comprises an ultra-fast solid-state laser, a coupling light path, an ultraviolet excimer laser, and a synchronous control module. The synchronous control module controls the synchronous triggering and delay control signals of the ultra-fast solid-state laser and the ultraviolet excimer laser. The laser ablation cell includes a sample stage, a sample stage control module, a real-time on-line monitoring module and a detection system. According to the technical scheme of the femtosecond excimer laser ablation sampling system, the femtosecond excimer laser is adopted as an ablation light source, so that the stability and energy limitation problem of the laser system can be effectively solved. Therefore, the precision and the accuracy of the detection system can be maximally ensured. Particularly, the influences of elemental differentiation, matrix effect and the like can be eliminated.

Description

technical field [0001] The invention relates to a femtosecond excimer laser ablation sampling system. Background technique [0002] As one of the methods for in-situ micro-area detection and analysis of materials, laser ablation sampling technology can ablate various complex materials layer by layer due to its wide adaptability, eliminating the need for sample preparation to achieve rapid detection, and each laser pulse ablation The amount is in the order of nanograms, which can basically be regarded as non-destructive testing. This method is widely used in earth science, life science, environmental science, and material science research. Laser ablation sampling technology can be effectively combined with many detection methods, such as inductively coupled plasma spectroscopy, inductively coupled plasma mass spectrometry, laser-enhanced plasma spectroscopy, laser-induced fluorescence spectroscopy, laser-induced breakdown spectroscopy, etc. With the development of scientific...

Claims

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Application Information

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IPC IPC(8): G01N1/02H01S3/00
CPCG01N1/02H01S3/0007
Inventor 方晓东游利兵
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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