Femtosecond excimer laser ablation sampling system
A technology of excimer laser and excimer laser, which is applied in the direction of lasers, phonon exciters, laser components, etc., can solve the problems of high cost, low laser energy, poor system stability, etc., to eliminate element differentiation and ensure accurate speed, addressing stability and energy limitation issues
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[0013] Such as figure 1 , 2 As shown, a femtosecond excimer laser ablation sampling system includes a femtosecond excimer laser system, a transmission and focusing optical path 5, a laser ablation pool and a system control module 6, and the femtosecond excimer laser system includes a super Fast solid-state laser 1, coupling optical path 2, ultraviolet excimer laser 3 and synchronous control module 4, synchronous control module 4 controls synchronous triggering and delay control signals of ultra-fast solid-state laser 1 and ultraviolet excimer laser 3, the laser ablation The pool includes a sample stage 7, a sample stage control module 8, a real-time online monitoring module 9, and a detection system 10. The femtosecond ultraviolet laser output by the ultrafast solid-state laser 1 is used as a seed laser and transmitted through the coupling optical path 2 into the ultraviolet excimer laser 3. The excimer laser 3 amplifies the excimer laser energy of the seed laser, and the las...
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