Interdigital electrode with porous metal modified surface and preparation method and application thereof

A technology of porous metal and modified surface, applied in the field of sensors, can solve the problems of difficulty in significantly improving the sensitivity of the sensor, increasing the sensitive components on the interdigital electrodes, and insignificant improvement in the sensitivity of the sensor, so as to improve the detection sensitivity, increase the load, and the bonding strength. high effect

Inactive Publication Date: 2016-10-26
HUIZHOU LEADAO ELECTRONICS MATERIAL
View PDF8 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, only by increasing the loading amount of the sensitive component on the interdigital electrode, due to the limitation of the specific surface area of ​​the sensitive layer, it is difficult for the loaded sensitive component to fully contact with the gas, and it is substantially difficult to significantly improve the sensitivity of the sensor.
Although increasing the a

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Interdigital electrode with porous metal modified surface and preparation method and application thereof
  • Interdigital electrode with porous metal modified surface and preparation method and application thereof
  • Interdigital electrode with porous metal modified surface and preparation method and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] This embodiment provides an interdigitated electrode with a porous metal modified surface, such as figure 1 and figure 2 , comprising an insulating base 1, an electrode layer 2 disposed on the surface of the insulating base 1; a porous metal layer 3 is provided on the reaction surface of the electrode layer 2, and a reaction hole 4 is arranged in the porous metal layer; the reaction holes communicate with each other.

[0039] There is also a transition metal layer 5 between the electrode layer and the insulating base layer, the thickness of which is 60A; the transition metal layer is a Ti layer.

[0040] In this embodiment, the insulating base layer is ceramic.

[0041] Further, in this embodiment, the diameter of the reaction hole is 60-70 nm; the surface porosity of the porous metal layer is 20%.

[0042] Furthermore, the thickness of the porous metal layer is 25 μm.

[0043] The above-mentioned electrode layer is composed of Ag simple substance.

[0044] Prefera...

Embodiment 2

[0046] This embodiment provides an interdigitated electrode with a porous metal modified surface, such as figure 1 and figure 2 , comprising an insulating base, 1. An electrode layer 2 arranged on the surface of the insulating base; the reaction surface of the electrode layer is provided with a porous metal layer 3, and the porous metal layer 3 is provided with a reaction hole 4; the reaction holes communicate with each other. In this embodiment, the insulating base is made of prepreg.

[0047] Further, in this embodiment, the diameter of the above-mentioned reaction pores is 70-80 nm; the surface porosity of the porous metal layer is 35%.

[0048] Furthermore, the thickness of the porous metal layer is 30 μm.

[0049]A transition metal layer 5 with a thickness of 100 Å is also provided between the electrode layer and the insulating base layer; the transition metal layer is a W layer.

[0050] The above-mentioned electrode layer is composed of a copper layer and a gold lay...

Embodiment 3

[0053] This embodiment provides an interdigitated electrode with a porous metal modified surface, such as figure 1 and figure 2 , including an insulating base, 1. An electrode layer 2 arranged on the surface of the insulating base; a porous metal layer 3 is provided on the reaction surface of the electrode layer, and 4 reaction holes are arranged in the porous metal layer; the reaction holes communicate with each other.

[0054] In this embodiment, the insulating base is made of glass.

[0055] Further, in this embodiment, the diameter of the above-mentioned reaction pores is 70-90 nm; the surface porosity of the porous metal layer is 20%.

[0056] Furthermore, the thickness of the porous metal layer is 50 μm.

[0057] Preferably, the above-mentioned porous metal layer is made of Cu metal. In this embodiment, the above-mentioned electrode layer may be made of copper.

[0058] There is also a transition metal layer 5 between the electrode layer and the insulating base laye...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Diameteraaaaaaaaaa
Thicknessaaaaaaaaaa
Diameteraaaaaaaaaa
Login to view more

Abstract

The invention discloses an interdigital electrode with a porous metal modified surface and a preparation method and application thereof. The electrode layer surface of the interdigital electrode is modified with a porous metal layer with a nanoscale pore structure, the sensitive component supporting capacity of the interdigital electrode can be effectively increased, and the detection sensitivity of a sensor can be improved. A porous metal layer of the surface of the interdigital electrode is further prepared by adopting an alloy removing method, the obtained porous metal layer has high bonding strength with an electrode layer, the delaying, attenuation and other problems are not produced in inter-layer signal transfer, and reaction pore distribution is uniform.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to an interdigital electrode with a porous metal-modified surface, its preparation method and application. Background technique [0002] Interdigital electrodes are commonly used sensor sensitive components. When preparing gas sensors, a sensitive layer (membrane) sensitive to a certain gas component needs to be loaded on the surface of the interdigital electrodes to generate a potential change on the interdigital electrodes when the gas concentration changes. Generally speaking, the loading amount of sensitive components is positively correlated with the sensitivity of the sensor to the target gas. In order to ensure the sensitivity of the sensor, it is necessary to load a sufficient amount of sensitive components on the interdigital electrodes. However, only by increasing the loading amount of the sensitive component on the interdigital electrode, due to the limitation of the spec...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01N27/00
CPCG01N27/00
Inventor 黄兴桥崔皓博
Owner HUIZHOU LEADAO ELECTRONICS MATERIAL
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap