Layer-to-layer registration control method for inner layers of HDI (High Density Interconnector) board
A control method and alignment technology, applied in multilayer circuit manufacturing, printed circuit manufacturing, electrical components, etc., can solve problems such as high rejection rate, large inner layers of HDI boards, and inability to meet HDI board production requirements, etc. The effect of low rejection rate, high alignment between inner layers and reasonable and novel design
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Embodiment 1
[0034] The present invention is a manufacturing method of a method for controlling alignment between inner layers of an HDI board, which is made by the following steps:
[0035] (1) Plate opening: Cut the substrate into an applicable size to facilitate the subsequent manufacturing process; during the process of cutting the substrate or after cutting, the substrate is heated and processed by the drying plate operation;
[0036] (2) Inner layer: Drill holes on the cut substrate to facilitate subsequent alignment and maintenance, and use film etching to make inner layer lines and patterns;
[0037] (3) AOI: Place the substrate prepared in step (2) on the optical inspection equipment, and perform defect detection on the substrate through the optical inspection equipment, recycle the unqualified substrate, and send the qualified substrate to the next step ;
[0038] (4) Browning: carry out browning treatment on the qualified substrates detected in step (3);
[0039] (5) Laminatio...
Embodiment 2
[0044] The difference between this embodiment and Embodiment 1 is that in the step (2), the circuit board grinder is not used to grind the substrate, but a chemical method is used for pretreatment. Before the browning operation in the step (4), the browning equipment needs to measure the degree of ion pollution, and carry out void detection on the edge of the back plate of the browning equipment.
Embodiment 3
[0046] The difference between this embodiment and Embodiment 1 and Embodiment 2 is that: the X-RAY target drilling operation is performed on the laminated substrate after the step (5) is completed, and the X-RAY target drilling operation uses the line compensation method, and Measure the expansion and contraction data of the substrate during the X-RAY drilling target operation. The auxiliary reinforcement material and the multi-layer substrate are pressed together by a pressing plate, and the temperature rise rate and thermal uniformity of the pressing plate are controlled during the pressing process.
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