Image sensor absolute spectral responsivity test device and test method

Abstract

An image sensor absolute spectral responsivity test device and its test method belong to the field of space optics technology. In order to solve the problem of large deviations in the image sensor absolute spectral responsivity test, an integrating sphere collector is installed at the position of the light outlet of the monochromator, and the integrating sphere collects The normal line of the light entrance of the instrument is perpendicular to the normal line of the light exit port, and the monochromatic light emitted by the monochromator is incident into the integrating sphere through the light entrance port, forming a uniform exit spot at the light exit port. Use a standard trap radiometer to test the radiant energy at the light exit of the integrating sphere, and use the area of ​​the light exit of the integrating sphere to calculate the irradiance at the light exit of the integrating sphere. When the image sensor is tested, the photosensitive pixel area of ​​the image sensor is close to the light outlet of the integrating sphere, and the corresponding image is obtained; the radiation energy obtained by the image sensor is calculated by using the pixel area, and the obtained radiation energy and the output signal of the image sensor are used , it is convenient to calculate the parameters such as absolute spectral responsivity and quantum efficiency of the image sensor.

Description

technical field [0001] The invention relates to an image sensor absolute spectral responsivity test device and a test method thereof, belonging to the technical field of space optics. Background technique [0002] Image sensors CCD and CMOS are important photoelectric conversion devices of space cameras, which convert the ground object radiation information imaged to the focal plane of the optical system into images, and the absolute spectral responsivity of the image sensor is an important technical index for evaluating the responsiveness of the sensor. This index has a direct impact on the imaging capability of the space camera. Since the non-uniformity of the monochromatic spot at the light outlet of the monochromator is as high as 10%, it has a great impact on the absolute spectral responsivity test results of the image sensor. Therefore, the light source output by the monochromator is currently used to test the relative spectral response of the image sensor. Spend. In...

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Problems solved by technology

[0003] In order to solve the problem of large deviation in the absolute spectral responsivity test of the image sensor in the prior art, the present invention proposes an absolute spectral responsivity test device and method with high spectral resolution

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