High-sensitivity micro-nano giant piezoresistive rainfall sensor and preparation method and measurement structure thereof
A rain sensor, high-sensitivity technology, applied in the field of sensor design of micro-nano electro-mechanical system, can solve the problems of small strain coefficient of silicon varistor, measurement difficulty, and limited application of manufacturing process, so as to improve sensitivity, improve reliability, The effect of improving accuracy
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[0058] refer to figure 1 , in this embodiment, the sensor array includes 9 sensing units in a structure of 3 rows×3 columns. Compared with a single sensor unit, the advantage of the sensor array is that it can reflect the overall change of the pressure in a region, but if it is set to a larger number of sensor units, it will increase the difficulty of wiring, and the number of sensors connected in series is too large It will cause the resistance of the sensor to be too large and it is not convenient to measure, but the 3×3 design structure can ensure the high sensitivity of the sensor and measure the pressure change within a certain range, which is suitable for the measurement of the rainfall change signal.
[0059] refer to Figure 4 , the present invention also includes a bracket 35, the bracket 35 is a hemisphere, and a plurality of sensor array installation slots 36 are evenly distributed on it, and the sensor array is installed in the installation slots. In application,...
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