Making method of large-caliber film diffraction element with high diffraction efficiency

A diffraction efficiency and diffraction element technology, applied in optical elements, diffraction gratings, optics, etc., can solve the problems of complex preparation process, low process repeatability, and high manufacturing cost, and achieve good repeatability, low alignment accuracy requirements, and low cost. low effect

Active Publication Date: 2016-11-23
UNIV OF SCI & TECH OF CHINA
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Problems solved by technology

[0005] In order to solve technical problems such as high equipment requirements, high manufacturing cost, low diffraction efficiency, low process repeatability, low yield and complicated preparation process in the preparation p

Method used

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  • Making method of large-caliber film diffraction element with high diffraction efficiency
  • Making method of large-caliber film diffraction element with high diffraction efficiency
  • Making method of large-caliber film diffraction element with high diffraction efficiency

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[0118] Example 1:

[0119] see image 3 , which is a schematic diagram of the specific process of step 1 with 16 steps (m=4). figure 2 contains 2 4 Quartz relief structure with 10 steps (ie 16 steps). The diffraction efficiency of the 16-step element prepared by the method of the present invention is above 95%

[0120] in, figure 2 The meanings of p1, p2, p3 and p4 are as follows: the unetched steps under the protection of the Cr film are represented by p1 and p3 respectively. One or more continuous steps that have been etched are regarded as a whole, and are represented by p2 and p4 respectively. Consider the four parts p1, p2, p3, and p4 as periodic structures; image 3 The schematic diagram of the production process of quartz substrate with 16-step relief structure is shown in image 3 The meanings of the serial numbers in (1) are: 1 is a mask, 2 is a positive photoresist, 3 is a Cr film, 4 is a quartz substrate, and 5 is a negative photoresist as an additional pro...

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Abstract

The invention provides a making method of a large-caliber film diffraction element with high diffraction efficiency to solve technical problems existing in a present preparing process of large-caliber film diffraction elements. The method includes the first step of making of a multi-step relief structure quartz substrate, the second step of polymer solution coating, the third step of polymer solution curing and film forming, the fourth step of film and substrate separating, and the fifth step of film splicing. The method has the advantages of being low in cost, high in repeatability, simple and efficient. The diffraction efficiency of the element made with the method is not lower than 7%.

Description

technical field [0001] The invention relates to the technical field of diffractive optical elements, in particular to a method for manufacturing a large-aperture film diffractive element with high diffraction efficiency. Background technique [0002] The development of modern warfare has put forward higher requirements for space remote sensing systems. Geosynchronous orbit satellites have the advantages of high timeliness and continuous detection capabilities, which are suitable for the needs of future military development. In order to improve the resolution of satellites in geosynchronous orbit to the earth, it is necessary to develop a large-aperture space telescope system. The weight of traditional reflectors increases dramatically with the increase of the caliber, which poses a great challenge to the rocket's carrying capacity, and the processing of large-diameter reflectors is also very difficult. The diffractive film imaging system can realize the characteristics of ...

Claims

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Application Information

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IPC IPC(8): G02B5/18
CPCG02B5/1847G02B5/1857
Inventor 张健刘正坤邱克强徐向东付绍军
Owner UNIV OF SCI & TECH OF CHINA
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