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Equipment and method for flexible hot wire CVD diamond coating

A diamond coating, flexible technology, applied in metal material coating process, coating, gaseous chemical plating and other directions, can solve the problem of inability to realize the preparation of diamond coating, achieve reliable structure, avoid the effect of poor air tightness

Active Publication Date: 2016-11-30
上海三朗纳米技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The above-mentioned device and method are only suitable for the deposition of diamond coating on the surface of a single or batch integral tool, and cannot realize the preparation of diamond coating on the surface of various tools and molds

Method used

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  • Equipment and method for flexible hot wire CVD diamond coating
  • Equipment and method for flexible hot wire CVD diamond coating
  • Equipment and method for flexible hot wire CVD diamond coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0061] Such as figure 2 Shown, when adopting the flexible hot wire CVD diamond coating equipment provided by the present invention to deposit diamond coating on the surface of high-speed train car body processing with large diameter (Φ 20mm) solid carbide 4-edge flat end milling cutter, specifically, the 21 flat-end milling cutters 102 are evenly distributed in three fixed blocks 105 with holes, and placed on the water-cooled platform 6 . Seven heating wires 101 are placed on two electrode rods 3 through seven electrode sleeves 4, and are distributed around the flat milling cutter 102 in a stepped shape. Six electrode pressing plates 2 are used to fix the heating wire, and seven sets of heating wire tensioning structures 5 ensure that the heating wire remains straight under loading and heating. The water cooling platform 6 realizes the circulation of cooling water through the cooling water inlet pipe 103 and the cooling water outlet pipe 104 to ensure the heat dissipation ef...

Embodiment 2

[0066] Such as image 3 As shown, when the flexible hot wire CVD diamond coating equipment provided by the present invention is used to deposit a nano-diamond coating on the inner surface of a hard alloy mold for copper tube drawing, the diameter of the inner hole of the mold is Φ22mm. Specifically, six molds 106 are placed in six V-shaped brackets 107 and placed on the water-cooling platform 6 . Two heating wires 101 pass through the centers of two groups of molds 106 respectively, and are placed on the electrode rod 3 through two electrode sleeves 4 . Three electrode pressing plates 2 are used to fix the heating wire, and two sets of heating wire tensioning structures 5 ensure that the heating wire remains in a straight state under loading and heating. The water cooling platform 6 realizes the circulation of cooling water through the cooling water inlet pipe 103 and the cooling water outlet pipe 104 to ensure the heat dissipation effect during the coating preparation proces...

Embodiment 3

[0071] Such as Figure 4 As shown, when the flexible hot wire CVD diamond coating equipment provided by the present invention is used to deposit the diamond coating on the surface of the monolithic cemented carbide flat cutter, specifically, 16 flat cutters 108 are evenly distributed on the monolithic The surface of the support platform 109 is placed on the water-cooled platform 6 . The four hot wires 101 are equally spaced above the flat cutter 108 and placed on the electrode rod 3 through four electrode sleeves 4 . Three electrode pressing plates 2 are used to fix the heating wire, and four sets of heating wire tensioning structures 5 ensure that the heating wire remains in a straight state under loading and heating. The water cooling platform 6 realizes the circulation of cooling water through the cooling water inlet pipe 103 and the cooling water outlet pipe 104 to ensure the heat dissipation effect during the coating preparation process.

[0072] The specific preparatio...

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PUM

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Abstract

The invention provides equipment and a method for a flexible hot wire CVD diamond coating. The equipment comprises a combined electrode system, a fixed water cooling vacuum reaction chamber, a constant voltage power supply system, an integrated gas control system and a movable base platform, wherein the combined electrode system is arranged on the movable base platform, the movable base platform drives the combined electrode system to enter the fixed water cooling vacuum reaction chamber or moves the combined electrode system out of the fixed water cooling vacuum reaction chamber, the integrated gas control system is used for inputting a reaction gas into the fixed water cooling vacuum reaction chamber, and the constant voltage power supply system is used for supplying electric energy for the integrated gas control system and the movable base platform. According to the present invention, with the movable base platform, the operation spaces for the coating base body installation and the hot wire arrangement are expanded, and the reliable structure is provided for the controllable distribution of the base body temperature during the diamond coating deposition process; and the problem of the poor air tightness due to the use of the vacuum dynamic sealing is avoided.

Description

technical field [0001] The invention relates to coating technology, in particular to a flexible hot wire CVD diamond coating equipment and method. Background technique [0002] Chemical vapor deposition diamond coating has many excellent properties such as high hardness, high thermal conductivity, low friction coefficient and low thermal expansion coefficient close to natural diamond, so it has become the surface coating material of cutting tools, molds and wear-resistant devices and wear-resistant under friction conditions. The material of choice for anti-friction coatings plays an increasingly important role in improving the friction and wear surface properties of materials. Equipment with stable and reliable performance is the basic condition for the controllable preparation of coatings. At present, my country's diamond coating equipment still relies on imports. Due to the technical blockade, the detailed deposition process parameters matching the equipment are not open ...

Claims

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Application Information

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IPC IPC(8): C23C16/27C23C16/44C23C16/458
CPCC23C16/271C23C16/44C23C16/4581
Inventor 姚勇叶长炽
Owner 上海三朗纳米技术有限公司