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A gold nanoporous film three-electrode ionization sulfur dioxide sensor

A technology of sulfur dioxide and gold nanometers, which is applied in the field of gas sensing, can solve the problems of affecting the performance of the sensor, affecting the process of practical application, and the collection current is small, and achieves the effects of low cost, extended life, and low working voltage

Active Publication Date: 2018-12-07
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The researchers also found that the three-electrode sensor has a high operating voltage (250V) and a small collection current ( figure 2 ), resulting in low sensitivity and affecting sensor performance
Secondly, the carbon nanotube material of the first electrode of the sensor is still bombarded by positive ions, resulting in a shortened life span and affecting the practical application process

Method used

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  • A gold nanoporous film three-electrode ionization sulfur dioxide sensor
  • A gold nanoporous film three-electrode ionization sulfur dioxide sensor
  • A gold nanoporous film three-electrode ionization sulfur dioxide sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0048] There are 12 small air holes 1-1 on the electrode of the first electrode, the aperture is set at 0.8mm, and the ratio of the pole spacing between the first electrode and the second electrode to the small air holes is 3 / 32; the second electrode is formed by the center There are 9 small lead-out holes, the diameter of the small lead-out hole is 1.2mm, the ratio of the distance between the first electrode and the second electrode, between the second electrode and the third electrode, and the diameter of the small lead-out hole is 1 / 16; There is one deep groove on the three electrodes, the side length of the deep groove is 6×8mm, and the depth is 200μm. The ratio of the electrode spacing between the second electrode and the third electrode to the hole depth of the collecting pole deep groove is 15 / 40.

[0049] In this embodiment, the steps of preparing the gold nanopore ionization thionyl fluoride sensor to the metal film substrate are as follows:

[0050] A silicon wafer e...

Embodiment 2

[0059] The basic structure of this embodiment is the same as that of Embodiment 1, the difference is that there are 16 small air holes on the electrode of the first electrode, the aperture is set at 3.6mm, and the distance between the first electrode and the second electrode is the same as the small air holes. The ratio of the aperture is 1 / 60; the second electrode has 16 small extraction holes in the center, the aperture of the small extraction hole is 5.0mm, and the ratio of the pole spacing between the first electrode and the second electrode to the aperture of the small extraction hole is 3 / 250; the ratio of the pole spacing between the second electrode and the third electrode to the diameter of the small lead-out hole is 9 / 1000; there are 12 deep grooves on the third electrode, the side length of the deep groove is 1.0×1.0mm, and the depth is 100μm. The ratio between the pole spacing between the second electrode and the third electrode and the groove depth is 4 / 5.

[006...

Embodiment 3

[0063] The basic structure of this embodiment is the same as that of Embodiment 1, the difference is that: the electrode surface of the first electrode has 20 small air holes with a diameter of 0.6 mm, and the distance between the first electrode and the second electrode is equal to the diameter of the small air holes. The ratio between them is 1 / 8. There are 20 small lead-out holes in the center of the second electrode. When the hole diameter is 1.0mm, the ratio between the electrode spacing between the first electrode and the second electrode and the diameter of the small lead-out holes is 3 / 40. The ratio between the pole spacing between the second electrode and the third electrode and the diameter of the small lead-out hole is 2 / 25. The third electrode has 20 deep grooves, and when the side length and depth are 8×8 mm and 240 μm respectively, the ratio between the electrode spacing between the second electrode and the third electrode and the groove depth is 3 / 16.

[0064] ...

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Abstract

The invention discloses a gold nanopore film three-electrode ionized sulfur dioxide sensor. The gold nanopore film three-electrode ionized sulfur dioxide sensor comprises a first electrode, a second electrode and a third electrode which are sequentially distributed from bottom to top, wherein the first electrode is composed of a metal film substrate attached and distributed with a gold nanopore film growing by adopting an evaporative evaporation method on the inner surface and a cathode provided with small air vents, the second electrode is composed of a leading-out electrode provided with a small leading-out hole in the center, the third electrode is composed of a collecting electrode provided with a deep groove formed in a plate surface, the three electrodes are respectively and mutually isolated through insulating supporting columns, and after the hole diameter of the small air vents is set, the separation distances among the three electrodes are set according to the hole diameter of the small air vents, the hole diameter of the small leading-out hole and the side length and depth of the deep groove. The gold nanopore film three-electrode ionized sulfur dioxide sensor detects sulfur dioxide concentration through current. Compared with the prior art, the working voltage of the sensor is small, the current of the collecting electrode is large, the sensitivity is high, and sulfur dioxide in sulfur hexafluoride background gas can be detected.

Description

technical field [0001] The invention relates to the field of gas sensing, in particular to a sensitive sulfur dioxide gas sensor in the background of sulfur hexafluoride based on gold nanoporous film and gas discharge principle. Background technique [0002] Due to the excellent insulation and arc extinguishing properties of sulfur hexafluoride gas, high-voltage sulfur hexafluoride circuit breakers are increasingly used in gas-insulated combined electrical appliances GIS. Under discharge or overheating faults, sulfur hexafluoride gas ionizes and decomposes to produce Some stable gases such as sulfur dioxide, the detection of sulfur dioxide gas can provide a scientific basis for the ablation of circuit breakers. Since the 1980s, a lot of research has been done on the detection of sulfur dioxide at home and abroad. At present, gas detection tubes, thermal conductivity detectors, semiconductor sensors, electrochemical sensors, gas chromatographs, infrared spectrometers, and ch...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/407
CPCG01N27/4075
Inventor 张勇陈麒宇程珍珍潘志刚张健鹏张嘉祥梁冰点童佳明张晶园王小华刘定新杨爱军贺永宁李昕荣命哲
Owner XI AN JIAOTONG UNIV