Parallelly connected capacitance type capacitance pressure sensor

Abstract

The invention aims to provide a parallelly connected capacitance type capacitance pressure sensor which effectively solves the problems that a single capacitance pressure sensor fails to effectively increase capacitance relative variation due to limit on geometric dimensioning and has too large internal resistance and small SNR (signal to noise ratio) and the like. The sensor comprises a matched shell, a fixed electrode assembled with the matched shell, pipe-shaped extraction electrode, a moving electrode and a pressure extraction opening. The sensor is characterized in that the pressure extraction opening is one with a public welding base, two fixed electrodes and moving electrodes with the same specification assembled in the matched shell and a capacitance pressure sensor of the pipe-shaped extraction electrode are connected with one public welding base pressure extraction opening, the fixed electrode is connected with a lead wire to form the capacitance pressure sensor parallelly connected with two capacitance pressure sensors. The parallelly connected capacitance type capacitance pressure sensor has a rational structure design, multiples capacitance relative variation, remarkably improves sensitivity and SNR, is good in stability and high in measuring accuracy and reduces internal resistance, which enables the measuring range, compared with a single one, a constant upper limit and substantial extension in small and micro direction.

Description

Technical field [0001] The invention relates to a capacitive pressure sensor, in particular to at least two capacitive pressure sensors combined on a pressure leading port in a shielding shell, and a parallel capacitive capacitive pressure sensor connecting the tubular leading electrodes of each fixed electrode. It can be widely used in microelectronics, uranium enrichment and other high-precision measurements that require high reliability and small micro-range. Background technique [0002] The current capacitive pressure sensor based on the principle of parallel plate capacitance has advantages for small and micro pressure measurement. It is a single capacitor or a single differential capacitor. Its electrode plate area is limited. The largest diameter that can be seen now is About 60mm, the relative change of capacitance cannot be effectively increased due to the limitation of geometric size. The representative one is the 626 capacitive pressure sensor of MKS Company of the U...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a parallel capacitive capacitive pressure sensor, which effectively solves the problems that a single capacitive pressure sensor cannot effectively increase the relative variation of capacitance due to the limitation of geometric size, the internal resistance is too large, and the signal-to-noise ratio is small. Reasonable, the relative change of capacitance increases exponentially, significantly improves the sensitivity and signal-to-noise ratio, good stability, high measurement accuracy, reduces internal resistance, makes the upper limit of the range unchanged compared with a single one, and greatly expands to the small and micro direction

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