Forming method of semiconductor structure
A semiconductor and gas technology, applied in the direction of semiconductor devices, electrical components, circuits, etc., can solve the problems of low yield rate of IGBT, poor conductivity of silver metal layer electrodes, etc., and achieve the effect of improving conductivity
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[0028] As described in the background art, in the prior art, the electrical conductivity of the silver metal layer electrode is poor. In view of the above problems, after analysis, it is found that the reasons for the problems are: figure 2 As shown in the figure, the silver atoms in the silver metal layer 1 can easily undergo redox reactions with oxygen in the air in a humid environment (high water vapor content and many water vapor particles 2) to generate Ag 2 O, resulting in white spots on the silver metal layer 1. At this time, conduct a conductivity test on the silver metal layer 1, if the probe is stuck on the Ag 2 On O (white spot), there will be a result that the conductivity test of the silver metal layer 1 fails. Therefore, it can be seen that Ag 2 O can reduce the electrical conductivity of the silver metal layer 1 . However, in a dry environment, it is difficult for silver atoms to undergo redox reactions with oxygen in the air to form Ag. 2 O.
[0029] Bas...
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