Double-face polishing machine for large-caliber optical element

Abstract

The invention discloses a double-face polishing machine for a large-caliber optical element, and belongs to the technical field of optical element machining. An upper polishing disc structure capable of swinging and rotating is adopted, an upper polishing disc carries out swing polishing and annular polishing on a workpiece at the same time, the polishing efficiency is improved, the polishing track becomes more uniform, and the problem that side treading and corner uplifting are likely to appear in the surface shape is solved; a lower polishing disc carries out annular polishing on the lower surface of the workpiece, a correction disc is adopted to carry out correction keeping on the surface shape of the lower polishing disc, the surface shape precision of the polishing discs is improved, the surface shape precision of the optical element is improved, and the small-size manufacturing error of the optical surface can be reduced; an adjustable clamp structure is adopted, adjustable technology parameters are increased, the polishing rack is further uniform, and the double-face polishing precision and the production efficiency are improved; the polishing machine is suitable for double-face polishing of the large-caliber optical element with the caliber reaching 600 mm and the special requirements for the depth of parallelism, reflective wavefront and transmission wavefront.

Description

technical field [0001] The invention belongs to the technical field of optical element processing, in particular to a double-sided polishing machine for large-diameter optical elements. Background technique [0002] With the development of modern optical systems, especially the rapid development of high-power laser devices, higher requirements are placed on the processing of large-diameter optical components. In addition to strict requirements on surface shape accuracy, parallelism, production cycle and production cost, small-scale manufacturing errors of optical surfaces have also attracted more and more attention. Small-scale manufacturing errors on optical surfaces can lead to high-frequency modulation of the beam and nonlinear growth of the system, which can easily cause damage to optical components and reduce the focusable power of the beam. [0003] At present, large-scale ring polishing machines at home and abroad adopt the method of single-sided polishing. The proce...

AI Technical Summary

Problems solved by technology

Small-scale manufacturing errors on optical surfaces can lead to high-frequency modulation of the beam and nonlinear growth of the system, which can easily cause damage to optical components and reduce the focusable power of the beam

[0003] At present, large-scale ring polishing machines at home and abroad adopt the method of single-sided polishing. The processing accuracy depends on the experience of the operator, and the requirements for the operator are high. When processing an optical element with a transmitted wavefront, only one side can be processed first, and the other One side needs to be protected, which makes it difficult to detect the transmitted wavefront, and the processing efficiency is low; the existing domestic double-sided polishing machine is mainly for small and medium-sized ultra-thin optical components with a diameter of 80-300mm, mainly focusing on the production cycle and production cost, surface shape accuracy, parallelism The precision requirements are generally not high, and cannot meet the requirements for double-sided polishing of optical components with a diameter of 600mm

Patent 2010101454338 proposes a ring and pendulum polishing double-sided polishing machine, which integrates ring and pendulum throwing, and is suitable for polishing large-diameter ultra-thin optical components with transmission and reflection wavefront requirements. The polishing efficiency of the workpiece varies greatly, and the workpiece needs to be turned over frequently during the processing process, and when the upper plate swings, the linear speed difference between the center and the edge position is relatively large, which may easily cause the workpiece surface to step and warp; in addition, Patent 2013202816890 proposes an active translational double-sided polishing machine, which integrates translational polishing and circular polishing, and is suitable for polishing large-diameter ultra-thin optical components that have special requirements for processing traces. It is easy to change the surface shape, which reduces the machining accuracy, and it takes extra time to repair the surface shape of the lower plate, which prolongs the processing cycle

In addition, large-diameter optical components can also be processed by using CNC small tool polishing, which can improve surface shape accuracy, but will introduce small-scale manufacturing errors on the optical surface, reducing the service life of optical components and system beam quality

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