808 nm semiconductor laser structure for green cursor line instrument
A semiconductor and laser technology, applied in the field of 808nm semiconductor laser structure, can solve the problems of poor wavelength stability of the pump source, achieve small threshold current, increase service time, and improve stability
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Embodiment 1
[0036] A kind of 808nm semiconductor laser structure used in green light line instrument, such as figure 1 As shown, it includes a substrate 1, a lower cladding layer 2, an active region 3, a first upper cladding layer 4, a second upper cladding layer 5, a contact layer 6, a first metal electrode layer 8, and a first The second upper cladding layer 5 and the contact layer 6 form a ridge structure, and the part of the first upper cladding layer 4 that does not cover the second upper cladding layer 5, the side surfaces of the ridge structure, and the part of the contact layer 6 that does not cover the first metal electrode layer 8 Parts are respectively covered with a dielectric film 7 , a first metal electrode layer 8 is disposed above the dielectric film 7 , and a second metal electrode layer 9 is disposed below the substrate 1 .
[0037] The substrate 1 is a GaAs substrate with a 0 degree off-angle; the material of the lower cladding layer 2 is Al 0.6 Ga 0.4 As material; th...
Embodiment 2
[0043] A kind of 808nm semiconductor laser structure that is used for green liner as described in embodiment 1, and its difference is,
[0044] The substrate 1 is a GaAs substrate with an off-angle of 15 degrees; the material of the lower cladding layer 2 is (Al 0.4 Ga 0.6 ) 0.5 In 0.5 P; the material of the active region 3 is Ga 0.5 In 0.5 P, the material of the first upper cladding layer 4 is (Al 0.4 Ga 0.6 ) 0.5 In 0.5 P, the material of the second upper cladding layer 5 is (Al 0.4 Ga 0.6 ) 0.5 In 0.5 P, the contact layer 6 is heavily doped GaAs. The dielectric film 7 is SiO2 with a thickness of 200nm. The first metal electrode layer 8 is TiPtAu, and the second metal electrode layer 9 is GeNiAu.
[0045] The active region 3 has a thickness of 250 nm. The largest optical confinement factor and thus the smallest threshold current density can be obtained.
[0046] Ga 0.5 In 0.5 The refractive index of P is 3.35, (Al 0.4 Ga 0.6 ) 0.5 In 0.5 The refractive ...
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