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Graphene-distributed multi-physical-quantity sensor array system

A sensor array and multi-physical quantity technology, applied in graphene, instruments, measuring devices, etc., can solve problems such as limited application, complex preparation process, sensor flexibility, and stretchable barriers

Inactive Publication Date: 2017-01-25
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Although the sensor chips disclosed in the above three patents can simultaneously measure multiple physical quantities such as temperature, humidity, and pressure, the preparation process is relatively complicated, and different films are used to make elements for measuring temperature, humidity, and pressure.
These sensors are all metal thin film resistive sensors. Due to the limitations of thin film technology, in order to reduce defects, the film is generally made thicker (>1μm), resulting in a relatively low resistance change rate ΔR / R, so compared with other types of sensors , relatively low sensitivity
Moreover, sensors based on metal thin films have insurmountable barriers in terms of flexibility and stretchability, which limit their applications.

Method used

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Embodiment 1

[0028] Embodiment 1 is a 3×3 array system, such as Figure 1-7 As shown, the array circuit board 105 and the array circuit arranged on the array circuit board 105 are included, and the array circuit board 105 is provided with some graphene distributed multi-physical quantity sensor sub-modules connected with the array circuit; the array circuit is distributed in each graphite The graphene distributed multi-physical quantity sensor sub-modules are connected to the electrodes of each graphene distributed multi-physical quantity sensor sub-module; and the gate of the graphene distributed multi-physical quantity sensor sub-module is controlled by an analog switch. The graphene distributed multi-physical quantity sensor sub-module includes four physical quantity sensors: a graphene strain sensor 101 , a graphene pressure sensor 104 , a graphene temperature sensor 102 and a graphene humidity sensor 103 . The graphene strain sensor 101 includes two strain sensing films 301 and strain...

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Abstract

The invention discloses a graphene-distributed multi-physical-quantity sensor array system. The graphene-distributed multi-physical-quantity sensor array system comprises an array circuit board and array circuits, wherein the array circuits are distributed on the array circuit board; a plurality of graphene-distributed multi-physical-quantity sensor sub-modules connected with the array circuits are arranged on the array circuit board; each graphene-distributed multi-physical-quantity sensor sub-module comprises four physical quantity sensors including a graphene strain sensor, a graphene pressure sensor, a graphene temperature sensor and a graphene humidity sensor.

Description

technical field [0001] The invention relates to a sensor array system, in particular to a graphene distributed multi-physical quantity sensor array system. Background technique [0002] Smart sensing technologies are positively changing the way people perceive, think and behave. Wearable devices, electronic skin and other sensor devices that can perceive external pressure, temperature, airflow and tactile signals like human skin. In particular, in the fields of human health monitoring, health management of large equipment, human-computer interaction and military fields, cumbersome wearable weapons and energy supply systems seriously limit the combat flexibility of soldiers, and the integrated technology of soft and multi-physical quantity sensing has become a Urgent needs. [0003] Strain, temperature, humidity, and pressure are important physical quantities in various monitoring systems, and these physical quantities are usually measured using separate sensors. The disad...

Claims

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Application Information

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IPC IPC(8): G01D21/02C01B32/182
CPCG01D21/02
Inventor 杨俊史浩飞魏大鹏罗伟孙泰胡云杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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