Double-junction single-photon avalanche diode and its fabrication method

Abstract

The invention discloses a double-junction single-photon avalanche diode and a production method thereof. Existing double-junction structures are low in photon detection efficiency. The method comprises the following steps: a p-well charge layer is formed by doping a p- substrate layer; the outer end of the p-well charge layer is doped with an inversion deep n-well; the inner end of the inversion deep n-well is doped with a control area; the outer end of the inversion deep n-well is doped with an n-well charge layer; the periphery of the n-well charge layer is doped with a p- type semiconductor layer; the outer end of the n-well charge layer is doped with a p+ type light absorption layer; an anodic electrode is placed at the outer end of the p+ type light absorption layer; the periphery of the p- type semiconductor layer is doped with an n-well layer and an n+ type semiconductor layer, and the n+ type semiconductor layer is doped into the n-well layer; a cathodic electrode is arranged at the outer end of the n+ type semiconductor layer; the outer end of the inversion deep n-well is doped with a p-well layer and a p+ type semiconductor layer, and the p+ type semiconductor layer is doped into the p-well layer; and a GND electrode is arranged at the outer end of the p+ type semiconductor layer. The double-junction single-photon avalanche diode provided by the invention has a tunable short-wave / long-wave detection function, and is higher in photon detection efficiency.

Description

technical field [0001] The invention belongs to the technical field of single-photon detection, and relates to a double-junction single-photon avalanche diode and a manufacturing method thereof. Background technique [0002] Single-photon detection technology is a very low-light detection and sensing technology, which has various application potentials in contemporary life, such as: bioluminescence, quantum communication, air pollution detection, radiation detection, astronomical research, high-sensitivity sensors etc. Single photon detectors mainly include photomultiplier tubes (PTMs), microchannel plates, superconducting nanowires, avalanche photodiodes (APDs), superconducting single photon detectors and superconducting edge sensors. In single-photon detection systems using single-photon avalanche photodiodes, photon detection efficiency (Photon Detection Efficiency, PDE) is a key factor to measure the single-photon detection capability of avalanche photodiodes. Therefor...

AI Technical Summary

Problems solved by technology

[0003] The avalanche multiplication region of traditional single-photon avalanche photodiodes is composed of a planar junction, which can only have good detection sensitivity for a single wavelength

At present, only a few double-junction structures have relatively low photon detection efficiency.

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