Method of wafer scale fabrication and assembly of a liquid crystal electro-optic device
An electro-optical device, liquid crystal technology, applied in chemical instruments and methods, optics, liquid crystal materials, etc., can solve problems such as pollution
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[0030] The above problems can be solved according to the proposed solution, where:
[0031] The fabrication of LCL optics is delicate and, in particular, more complex than fabrication of conventional all-solid-state integrated circuits. Referring to Fig. 1, an LCL wafer 10 is a 2D array of several thousand LCL optical devices 12, which, due to the liquid nature of the LC layer(s) employed, must contain a large number of liquid reservoirs. In the context of this patent application, "wafer" may refer to a substrate of any shape (eg round, rectangular, etc.) and of any type (eg glass, silicon, sapphire).
[0032] For simplicity of illustration, the LC material is birefringent and the figures show polarization-dependent LCL optics (one layer of LC on a single wafer). For example, referring to FIG. 2, each final (cut from wafer) LCL optical device 12 includes a substrate 16, 18, and an LC reservoir 22 containing a working fluid separated by a (viscous) reservoir wall 20 which can ...
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