Five-degree-of-freedom polishing manipulator for large aperture optical component

An optical element and manipulator technology, applied in the field of optics, can solve the problems that restrict the development of large-scale aspheric processing technology, long processing cycle, etc., and achieve the effect of facilitating simultaneous work, small space position, simplified structure and control system

Inactive Publication Date: 2017-05-03
张桂春
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Problems solved by technology

At present, the mainstream processing technology of large aspheric optical components in China is still the traditional classic tape polishing processing technology, but its processing cycle is relatively long
The emergence of modern computer-controlled polishing (CCOS) technology, stress disk and other processing technologies can improve the processing quality and efficiency of large-diameter optical components to a certain extent, but these methods without exception depend to a large extent on the accuracy of machine tools. It has become one of the factors restricting the development of large-scale aspheric surface processing technology in my country

Method used

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  • Five-degree-of-freedom polishing manipulator for large aperture optical component
  • Five-degree-of-freedom polishing manipulator for large aperture optical component

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Embodiment Construction

[0014] The present invention will be further described below in conjunction with drawings and embodiments.

[0015] Such as figure 1 , The polishing head system of the manipulator adopts the movement mode of flat rotation, pneumatic pressure, Z-axis floating, the polishing mold and the grinding head shaft are flexibly connected by a ball hinge and a dial pin, and the screw located above the grinding head shaft can adjust the eccentricity. First of all, the translational rotation motion method can not only produce a smooth curve with a peak in the center, but also because the polishing disc translates, the gradient change of the optical surface covered by the polishing disc in one rotation cycle is the smallest, which is conducive to the coincidence between the polishing disc and the surface of the workpiece; pneumatic processing The pressure and the Z-axis float, while generating a stable polishing pressure, the polishing die changes in real time with the workpiece surface sa...

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Abstract

The invention discloses a five-degree-of-freedom polishing manipulator for a large aperture optical component. A motion mode of horizontal rotation, pneumatic pressurizing and Z-axis floatation are adopted; a polishing die is flexibly connected with a grinding head shaft by a spherical hinge and a pulling pin; and the eccentric distance can be adjusted by a screw positioned above the grinding head shaft. The five-degree-of-freedom linkage of the manipulator can provide a motion mode and a path required by an MCM technology; and by adoption of a cylindrical coordinate structure, the occupied spatial position is small, and the work is favorably developed by multiple stations.

Description

technical field [0001] The invention relates to a five-degree-of-freedom polishing manipulator for large-diameter optical elements, which is suitable for the optical field. Background technique [0002] With the continuous development of space optics technology, beam control technology and large-scale astronomical telescope technology, there is an increasing demand for large-aperture optical components, especially large-aperture aspheric optical components. At present, the mainstream processing technology of domestic large-scale aspheric optical components is still the traditional classic tape polishing processing technology, but its processing cycle is long. The emergence of modern computer-controlled polishing (CCOS) technology, stress disk and other processing technologies can improve the processing quality and efficiency of large-diameter optical components to a certain extent, but these methods without exception depend to a large extent on the accuracy of machine tools....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B13/00B25J11/00B24B41/00
CPCB24B13/00B24B41/00B25J11/0065
Inventor 张桂春
Owner 张桂春
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