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Roller device and solar cell manufacturing device using same

A roller and rotating shaft technology is applied in the field of solar cell processing devices, which can solve the problems of easy loosening of the rollers, insulation performance, and inability to carry out production smoothly, and achieve the effect of ensuring locking and fixing.

Pending Publication Date: 2017-05-10
CHANGZHOU BITAI TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a roller device to solve the existing technical problems that the existing rollers are easy to loose and have poor insulation performance
[0005] The purpose of the present invention is also to provide a solar cell production equipment to solve the technical problem that the existing solar cell production equipment cannot be produced smoothly due to the easy looseness of the rollers and poor insulation performance

Method used

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  • Roller device and solar cell manufacturing device using same
  • Roller device and solar cell manufacturing device using same
  • Roller device and solar cell manufacturing device using same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] figure 1 Schematic diagram of the structure of the roller device provided in Embodiment 1 of the present invention (the rotating shaft is not shown); figure 2 for figure 1 top view of image 3 for figure 2 The cross-sectional view along the A-A line (for clarity, the axis of rotation is shown); Figure 4 It is a schematic structural diagram of a locking member provided in Embodiment 1 of the present invention. see Figure 1 to Figure 4 As shown, this embodiment provides a roller device, including a locking assembly, a rotating shaft 101 and a roller 102; the locking assembly has a hole 103 for the rotating shaft 101 to pass through, and the rotating shaft 101 passes through the hole 103, and the end of the rotating shaft 101 The part extends into the inside of the roller 102, and the locking assembly fixes the roller 102 and the rotating shaft 101 together; the inner part of the roller 102 is provided with an insulating layer 113, and the insulating layer 113 is ...

Embodiment 2

[0055] Figure 5 The front view of the loading chamber of the solar cell production equipment provided by Embodiment 2 of the present invention; Image 6 It is a top view of the loading chamber of the solar cell production equipment provided by Embodiment 2 of the present invention. see Figure 5 and Image 6 As shown, this embodiment provides a solar cell production equipment, including a driving device and the roller device provided in Embodiment 1, and the driving device is used to drive the rotating shaft 101 to rotate. The solar cell production equipment, especially the solar cell production equipment of chain type dry texturing and vacuum coating, mainly includes a loading chamber, a process chamber and an unloading chamber, each chamber is provided with a roller device provided by Embodiment 1 of the present invention, which drives The device drives the rotating shaft 101 to rotate to drive the roller 102 to rotate, so that the silicon wafer carrier is sequentially a...

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Abstract

The invention relates to the technical field of solar cell processing devices, and particularly relates to a roller device and a solar cell manufacturing device using the same. The roller device comprises a locking assembly, a rotation shaft and a roller. The locking assembly is provided with a hole through which the rotation shaft passes. The rotation shaft runs through the hole. The end part of the rotation shaft extends into the roller. The roller and the rotation shaft are fixedly connected together through the locking assembly. An insulating layer is arranged in the roller. The insulating layer is located between the inner surface of the roller and the outer surface of the rotation shaft. An insulating septum is arranged between the roller and the locking assembly. According to the invention, the roller device can run in an environment with ion bombardment, corrosion and high temperature, and can ensure fixed locking between the roller and the rotation shaft and the insulation between the rotation shaft and the roller; the solar cell manufacturing device which uses the roller device can ensure smooth production; and a product can meet technical requirements.

Description

technical field [0001] The invention relates to the technical field of solar cell processing devices, in particular to a roller device and solar cell production equipment using the roller device. Background technique [0002] Crystalline silicon solar cells are widely used due to their advantages of simple process and high solar energy conversion efficiency. In the production of crystalline silicon cells, RIE dry texturing and PECVD vacuum coating are two important vacuum process technologies. RIE dry texturing is a rough surface with low reflectivity formed by plasma excitation in a vacuum chemical atmosphere. The plasma-enhanced chemical vapor deposition (PECVD) vacuum coating is used for the formation of silicon nitride anti-reflection film on the front surface and aluminum oxide and silicon nitride passivation film on the back surface. [0003] The general process flow of RIE dry texturing and PECVD vacuum coating technology is: place the silicon wafer on the carrier in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677H01L31/18
CPCH01L31/1876H01L21/67706Y02E10/50Y02P70/50
Inventor 谭兴波朱海剑庄正军
Owner CHANGZHOU BITAI TECH