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Ultra-fast detection structure for metal micro Nano supersrtucture surface plasma polariton

A surface plasmon, superstructure technology, applied in the field of optics and micro-nano systems, can solve the problems of slow transmission speed and limited sensitivity, and achieve the effect of enhancing light absorption performance and high-sensitivity detection performance

Inactive Publication Date: 2017-05-17
ZHONGBEI UNIV
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  • Claims
  • Application Information

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Problems solved by technology

Aiming at the problems that the current photodetector made of graphene has limited sensitivity and slow transmission speed due to the lack of photogenerated carriers, the present invention proposes a metal micro-nano ultra- Structured Surface Plasmon Ultrafast Photodetection Structure

Method used

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  • Ultra-fast detection structure for metal micro Nano supersrtucture surface plasma polariton

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Embodiment Construction

[0011] A metal micro-nano superstructure surface plasmon ultrafast detection structure, including a Si substrate 1, a layer of silicon dioxide 2 grown on the Si substrate 1, a layer of graphene film 3 on the silicon dioxide layer, and a graphene film 3 Both sides of the top are respectively provided with square metal Au blocks 5, and the graphene film 3 between the two square metal Au blocks 5 is provided with a layer of TiO4, and spherical metal Ag6 is evenly distributed on the TiO4 layer, and spherical metal Ag6 is provided with There is a layer of graphene film covering layer 7.

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Abstract

The invention relates to the technical field of optics and micro Nano system, in particular to an ultra-fast detection structure for metal micro Nano superstructure surface plasma ploariton. The structure comprises Si base where a layer of silica is cultured. A lay of graphene film is provided on the layer of the silica and square shape metal Au is placed on the both sides of the graphene film and a layer of TiO is placed on the graphene film between the square shape metal Au. Globular metal Ag is provided on the layer of the TiO. A cover layer of the graphene film is provided on the globular metal Ag. A nanoscale gap is shown among the globular metal Ag. The invention solves the problems of being limited in sensitivity due to lack of photon-generated carriers brought by the photodetector made of the graphene and being low in transmission speed.

Description

technical field [0001] The invention belongs to the fields of optics and micro-nano systems, and specifically relates to a metal micro-nano superstructure surface plasmon ultrafast detection structure. Background technique [0002] With the rapid development of the sea, land and air integration strategy, the breakthrough progress of "superior" weapons has greatly accelerated the movement speed of the target. A large number of aviation and navigation equipment have put forward higher requirements for the tracking dynamic performance of the tracking system and fast infrared imaging recognition technology. . In the increasingly fierce maritime disputes, it is very important to realize the detection and response of specific optical signals and fast imaging display. The fast response photoelectric detector is to realize ship early warning tracking, trajectory prediction, short-range surveillance, ship identification, The key to coastal imaging, night navigation, and precise posi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/09H01L31/0232G01J5/10
CPCG01J5/10G01J2005/0077H01L31/02327H01L31/09
Inventor 张志东赵学峰崔建功闫树斌薛晨阳
Owner ZHONGBEI UNIV
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