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A graphite boat cleaning process

A graphite boat and process technology, applied in the field of graphite boats, can solve the problems of coating chromatic aberration, low solution concentration, affecting the conductivity of cell sheets, etc., and achieve the effect of reducing chromatic aberration sheets, reducing rework isolation rate, and reducing rework costs.

Active Publication Date: 2019-12-13
RISEN ENERGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] 1) The concentration of the solution is low and the whole boat cleaning cannot completely clean the silicon nitride film on the surface of the graphite boat;
[0005] 2) The drying temperature is low, and the moisture in the graphite boat cannot be completely dried;
[0006] 3) During the saturation process, silicon nitride will be deposited inside the graphite stuck point, which affects the conductivity of the graphite boat and the battery sheet during normal use, the color difference of the coating is serious, and the rework rate of the coating is high

Method used

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  • A graphite boat cleaning process

Examples

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Effect test

Embodiment 1

[0035] A graphite boat cleaning process, comprising the following steps:

[0036] 1) Dismantle the boat: Unscrew the graphite boat nut, remove the ceramic rod, ink boat piece, boat foot, and graphite block; put the disassembled graphite boat piece, boat foot, and graphite block into the flower basket and wait for cleaning; before cleaning Place the disassembled graphite boats, boat feet, and graphite blocks neatly in the basket to ensure that there is no tightness or overlap between the boats;

[0037] 2) pickling: use the pickling solution to wash the graphite boat for 4 hours in the acid tank with a cover, bubbling every hour for 5-10min; the pickling solution is a mixed solution of hydrofluoric acid and hydrogen peroxide, and the The concentration of hydrofluoric acid in the pickling solution is 35vt%. In the pickling solution, HF and H 2 o 2 The molar ratio is 8:1;

[0038] 3) Washing to neutrality: Drain the pickling solution from the graphite boat treated in step 2), ...

Embodiment 2

[0043] A graphite boat cleaning process, comprising the following steps:

[0044] 1) Dismantle the boat: Unscrew the graphite boat nut, remove the ceramic rod, ink boat piece, boat foot, and graphite block; put the disassembled graphite boat piece, boat foot, and graphite block into the flower basket and wait for cleaning; before cleaning Place the disassembled graphite boats, boat feet, and graphite blocks neatly in the basket to ensure that there is no tightness or overlap between the boats;

[0045] 2) pickling: use the pickling solution to wash the graphite boat for 4 hours in the acid tank with a cover, bubbling every hour for 5-10min; the pickling solution is a mixed solution of hydrofluoric acid and hydrogen peroxide, and the The concentration of hydrofluoric acid in the pickling solution is 40vt%. In the pickling solution, HF and H 2 o 2 The molar ratio is 7:1;

[0046] 3) Washing to neutrality: Drain the pickling solution from the graphite boat treated in step 2), ...

Embodiment 3

[0051] A graphite boat cleaning process, comprising the following steps:

[0052] 1) Dismantle the boat: Unscrew the graphite boat nut, remove the ceramic rod, ink boat piece, boat foot, and graphite block; put the disassembled graphite boat piece, boat foot, and graphite block into the flower basket and wait for cleaning; before cleaning Place the disassembled graphite boats, boat feet, and graphite blocks neatly in the basket to ensure that there is no tightness or overlap between the boats;

[0053] 2) pickling: use the pickling solution to wash the graphite boat for 4 hours in the acid tank with a cover, bubbling every hour for 5-10min; the pickling solution is a mixed solution of hydrofluoric acid and hydrogen peroxide, and the The concentration of hydrofluoric acid in the pickling solution is 45vt%. In the pickling solution, HF and H 2 o 2 The molar ratio is 7.5:1;

[0054] 3) Washing to neutrality: Drain the pickling solution from the graphite boat treated in step 2)...

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Abstract

The invention discloses a graphite boat cleaning process. The graphite boat cleaning process comprises the following steps of 1) performing boat dismantling; 2) acid washing: washing the graphite boat by an acid washing solution, wherein the acid washing solution is a mixed solution of hydrofluoric acid and hydrogen peroxide; the concentration of the hydrofluoric acid in the acid washing solution is 30-50vt%; and the molar ratio of HF to H<2>O<2> in the acid washing solution is (7-9) to 1; 3) performing water washing until a neutral state is reached; 4) drying; 5) performing boat assembling; and 6) performing a saturation operation. By virtue of the cleaning process, generation of a chromatic aberration sheet in a film coating process in solar cell production can be effectively lowered, so that the rework rate of the film coating process can be reduced and the rework cost is effectively lowered.

Description

technical field [0001] The invention relates to a graphite boat in a solar cell preparation process, in particular to a graphite boat cleaning process. Background technique [0002] With the development of the photovoltaic industry and the continuous innovation of technology, the coating process in the manufacturing process of solar cells has also changed from the original plate PECVD to tubular PECVD. It is silicon nitride), which increases the absorption of sunlight by the cell, thereby improving the photoelectric conversion efficiency of the solar cell. Graphite boats are used as carriers in tubular PECVD coatings, and when the number of times of use is high, the silicon nitride deposited on the surface of the graphite boats is thick and unevenly distributed, which leads to uneven distribution of silicon nitride films deposited on solar cells , which leads to serious color difference problems in the cells. At present, most companies use graphite boat cleaning and saturat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/02H01L21/673H01L31/18
CPCH01L21/02041H01L21/673H01L31/18Y02P70/50
Inventor 何长春魏晓波张文锋
Owner RISEN ENERGY
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