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Method for cutting glass by using femtosecond laser

A technology of femtosecond laser and femtosecond laser, which is applied in the direction of glass production, glass manufacturing equipment, glass cutting device, etc., can solve the problems of micro-cracks and edge chipping easily, so as to solve edge chipping, improve cutting yield, simplify Process effect

Active Publication Date: 2017-07-21
WUHAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] In order to solve the above technical problems, the present invention provides a method for cutting glass with femtosecond laser, which can solve the effects of edge chipping, microcracks and delamination that are easy to occur during the glass cutting process, improve the cutting yield, and simplify the process

Method used

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  • Method for cutting glass by using femtosecond laser
  • Method for cutting glass by using femtosecond laser
  • Method for cutting glass by using femtosecond laser

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] Such as Figure 1 to Figure 3 As shown, the specific process of femtosecond laser cutting glass is as follows;

[0035] (1) Place a glass slide with a relatively flat surface on the XYZ horizontal workbench of the three-dimensional mobile platform;

[0036] (2) Move the three-dimensional platform so that the focal point is on the surface of the slide;

[0037] (3) Place a glass sample with a size of 60mm×120mm and a thickness of 0.33mm on a glass slide, and move the three-dimensional platform so that the focal point is at a distance of 130 μm from the lower surface of the glass;

[0038] (4) The femtosecond laser with a wavelength of 520nm, a pulse width of 250fs, a pulse repetition rate of 100kHz, and a single pulse energy of 6 μJ is used as the cutting laser beam, and the lens 1 with a numerical aperture of 0.25 is used for focusing. The focused laser beam is directly It is incident on the inside of the glass workpiece, and the diameter of the focused spot is 5 μm, ...

Embodiment 2

[0041] Embodiment 2 and Embodiment 3 adopt the femtosecond laser and process parameters in Table 1, follow the same working process as Embodiment 1, and the edge quality of the cut glass is better.

[0042] Table 1

[0043]

[0044]

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Abstract

The invention discloses a method for cutting glass by using femtosecond laser. The method comprises the following steps: providing glass to be cut and a femtosecond laser; adjusting light: adjusting collimating degree and a beam waist radius of a laser beam produced by the laser by using a beam-expanding and collimating mirror; focusing: focusing the laser beam into a glass workpiece by using a lens; cutting: moving the glass workpiece relative to the focused laser beam to achieve glass cutting. The method has an innovative point as follows: a stress generated inside the glass is focused by the femtosecond laser so as to automatically crack the glass workpiece, and edge pulling is not required. By the method for cutting the glass by using the femtosecond laser, through an up-and-down through crack formed by the high-energy femtosecond laser beam, single laser scanning is completed to cause automatic crack of the glass, so that an additional edge pulling process is not required, and a microcrack-free and damage-free workpiece can be obtained; the cutting yield is high; the process is simple.

Description

technical field [0001] The invention belongs to the field of laser cutting, in particular to a method for cutting glass with a femtosecond laser. Background technique [0002] The application of ultra-thin glass is becoming more and more widespread. In some aspects, especially in the fields of consumer electronics (manufacturing optical components and cover glass), flat panel display and other fields, the requirements for cutting quality and cutting yield are very strict. Traditional glass cutting technology has been Gradually unable to meet the requirements of production. [0003] Such as high temperature resistant and high hardness borosilicate glass as TFT-LCD substrate and tempered glass used in automobiles. In terms of glass thickness, the thickness of float glass has reached more than 20mm, and the thinnest glass used for flat panel display has reached 0.15mm, and some glass used in electronic products even reaches 0.05mm. Mechanical cutting of glass that is too thin...

Claims

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Application Information

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IPC IPC(8): C03B33/09
CPCC03B33/091Y02P40/57
Inventor 刘超阚保春胡煜洲韩建军赵志永
Owner WUHAN UNIV OF TECH
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