Single-surface pressure grouting forming method of ITO rotating target blank body and mold
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- 725TH RES INST OF CHINA SHIPBUILDING INDAL CORP
- Publication Date
- 2017-07-28
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Abstract
Description
technical field
[0001] The invention relates to a method for forming a rotary ceramic target body and a mold used therefor, in particular to a single-side centrifugal pressure grouting molding method and mold for an ITO rotary target body. Background technique
[0002] ITO is the abbreviated name of Tin-doped Indium Oxide. The meaning of ITO refers to a kind of indium tin oxide material. The ITO rotary target body refers to the cylindrical blank made of indium tin oxide before sintering. The inner diameter is generally 150~200mm, the outer diameter is 165~220mm, and the cylinder height is 300~350mm.
[0003] At present, the molding methods of the ITO rotating target blank usually include rubber sheath dry powder cold isostatic pressing and grouting molding using ordinary gypsum as the mold. Chinese patents (CN 103193262 A, CN 103787651 A) and others have reported methods for preparing high-density ITO targets by cold isostatic pressing. After cold isostatic pressing, the de...