A capillary type fiber grating high-temperature sensor and a manufacturing method thereof
A temperature sensor, fiber grating technology, applied in thermometers, thermometers with physical/chemical changes, instruments, etc., can solve the problems of large metallized packaging structure, low temperature resistance of organic adhesives, and large thermal mismatch. , to achieve the effect of improving long-term stability and reliability, reducing structural size, and expanding operating temperature range
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Embodiment 1
[0038] like figure 1 As shown, a capillary fiber grating high-temperature temperature sensor includes: a fiber grating 3 as a temperature measurement sensitive element, a non-metallic capillary 4 as a packaging structure, an optical fiber 1 and a cavity 5, wherein the optical fiber grating 3 is engraved on the optical fiber 1 . The connection relationship is: insert the optical fiber 1 engraved with the fiber grating 3 into the non-metallic capillary 4, and there is a certain distance between the end face 6 of the fiber and the end face 7 of the capillary as the cavity 5, and the size of the cavity 5 is designed to ensure the freedom of the fiber grating 3. Stretches to isolate strain for temperature measurement.
[0039] The manufacturing method of the sensor will be described in detail below by taking a quartz optical fiber, a fiber grating sensitive element carved by an excimer laser, and a quartz glass capillary with double-ended openings as examples.
[0040] A kind of ...
Embodiment 2
[0052] like figure 1 As shown, a capillary fiber grating high-temperature temperature sensor includes: a fiber grating 3 as a temperature measurement sensitive element, a non-metallic capillary 4 as a packaging structure, an optical fiber 1 and a cavity 5, wherein the optical fiber grating 3 is engraved on the optical fiber 1 . The connection relationship is: insert the optical fiber 1 engraved with the fiber grating 3 into the non-metallic capillary 4, and there is a certain distance between the end face 6 of the fiber and the end face 7 of the capillary as the cavity 5, and the size of the cavity 5 is designed to ensure the freedom of the fiber grating 3. Stretches to isolate strain for temperature measurement.
[0053] The fabrication method of the sensor will be described in detail below by taking a quartz optical fiber, a fiber grating sensitive element engraved by a femtosecond laser, and a single-end closed sapphire crystal capillary as examples.
[0054] A kind of ma...
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