Rhenium disulfide nanosheet array film adsorption sensor and preparation method thereof

Abstract

The invention discloses a rhenium disulfide nanosheet array film adsorption sensor and a preparation method thereof. The sensor comprises an electrode base and a sensitive material. The electrode base is composed of a gold electrode and a ceramic insulating sheet substrate, wherein the gold electrode is an interdigital electrode structure. The sensitive material is a rhenium disulfide nanosheet array film, and is synthesized by chemical vapor deposition method. Through design of the synthetic strategy, the rhenium disulfide nanosheet array film in an orientation perpendicular to the electrode base can be deposited on the electrode base so as to compose the adsorption sensor. The sensor has the characteristics of simple structure, small size, low preparation cost and simple synthesis. Because of the vertical orientation of the nanosheet, more gas molecules can be adsorbed on the surface, thus being beneficial to diffusion of molecules. Therefore, compared with the existing sensors, the sensor provided by the invention has the advantages of high sensitivity, short response recovery time and good accuracy, and is very suitable for popularization and application.

Description

technical field [0001] The disclosure relates to the field of micro-nano gas sensing, in particular to an adsorption sensor and a preparation method of a rhenium disulfide nanosheet array film. Background technique [0002] In recent years, with the needs of gas detection in various industries and the rapid development of micro-nano manufacturing technology, nanosensors will definitely play an important role in future gas detection applications. Transition metal dichalcogenides (TMDs) have unique electrical and optical properties. Each layer of material is bonded together through weak interactions such as van der Waals forces. The two-dimensional nanomaterials constructed by it can be mechanically exfoliated or chemical vapor deposition. It has excellent adsorption and conductivity properties, and shows excellent application prospects in the field of micro-nano gas sensors. The principle of the adsorption sensor is that when gas molecules are adsorbed on the surface of a se...

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Problems solved by technology

In 2005, Huang et al. of Yunlin University of Science and Technology obtained vertically oriented CNTs three-terminal sensors by chemical vapor deposition, and completed the N 2 test, but the response recovery time is longer

However, the TMOs sensor has a high operating temperature, and the synthesis process is complicated and the cost is high.

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