Unlock instant, AI-driven research and patent intelligence for your innovation.

Method for manufacturing electric field-induced molded modulatable liquid grating

A technology of electric field induction and manufacturing method, which is applied in the direction of diffraction gratings, optics, optical elements, etc., can solve the problems of limiting the application of gratings and changing the parameters of line structure parameters, and achieves the advantages of improving diffraction efficiency, reducing the influence of scattering, and widening the modulation range. Effect

Active Publication Date: 2017-09-12
CHANGZHOU RUIFENGTE TECH CO LTD
View PDF6 Cites 4 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The grating is the diffraction grating, which is an optical element that uses the principle of diffraction to disperse light. As the core component of the optical system, it is widely used in the fields of spectroscopic instruments, precision measurement, optical communication, display technology, and laser tuning technology. The traditional diffraction grating is through Micro-manufacturing processes such as mechanical scribing, holographic lithography, and dry etching are produced on hard substrate materials such as metals, metal dielectric films, and quartz. The actual needs of engineering applications are changed, and the physical characteristics of the grating are corrected, which greatly limits the application of the grating

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for manufacturing electric field-induced molded modulatable liquid grating
  • Method for manufacturing electric field-induced molded modulatable liquid grating
  • Method for manufacturing electric field-induced molded modulatable liquid grating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] A method for manufacturing a modulated liquid grating induced by an electric field, comprising the following steps:

[0027] (1) Preparation of induced templates and substrates:

[0028] like figure 1 , select zero-expansion invar as the material for inducing template 1 and substrate 2, sputter a layer of chromium layer with a thickness of 200 nm on the surface of inducing template 1 and substrate 2, and use nano-imprinting and reactive ion etching methods. A first periodic grid-like convex structure 3 and a second periodic grid-like convex structure 4, the first periodic grid-like convex structure 3 and the second periodic grid-like convex structure 3 having the same morphology are formed on the induced template 1 and the substrate 2 The widths of the periodic grid-like raised structures 4 are both 10 μm and the thicknesses are both 200 nm. The first periodic grid-like raised structures 3 and the second periodic grid-like raised structures 4 are connected through a s...

Embodiment 2

[0036] A method for manufacturing a modulated liquid grating induced by an electric field, comprising the following steps:

[0037] (1) Preparation of induced templates and substrates:

[0038] like figure 1, select zero-expansion invar as the material for inducing template 1 and substrate 2, sputter a layer of chromium layer with a thickness of 190 nm on the surface of inducing template 1 and substrate 2, and use nano-imprinting and reactive ion etching methods. On the induction template 1 and the substrate 2, the first periodic grid-like convex structure 3 and the second periodic grid-like convex structure 4, the first periodic grid-like convex structure 3 and the first periodic grid-like convex structure 3 and the second periodic The width of the two periodic grid-like raised structures 4 is both 10 μm and the thickness is 190 nm. The line is connected with the address switch 5, and the address switch 5 is a board-type multi-channel controllable relay array, which can be...

Embodiment 3

[0046] A method for manufacturing a modulated liquid grating induced by an electric field, comprising the following steps:

[0047] (1) Preparation of induced templates and substrates:

[0048] like figure 1 , select zero-expansion invar as the material for inducing template 1 and substrate 2, sputter a layer of chromium layer with a thickness of 210 nm on the surface of inducing template 1 and substrate 2, and use nano-imprinting and reactive ion etching methods. On the induction template 1 and the substrate 2, the first periodic grid-like convex structure 3 and the second periodic grid-like convex structure 4, the first periodic grid-like convex structure 3 and the first periodic grid-like convex structure 3 and the second periodic The width of the two periodic grid-like raised structures 4 is both 10 μm and the thickness is 210 nm. The line is connected with the address switch 5, and the address switch 5 is a board-type multi-channel controllable relay array, which can b...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
Thicknessaaaaaaaaaa
Thicknessaaaaaaaaaa
Thicknessaaaaaaaaaa
Login to View More

Abstract

The invention discloses a method for manufacturing an electric field-induced molded modulatable liquid grating. The method comprises the following steps: preparation of an inducing template and a substrate: forming the inducing template with a periodic grid-like bulge structure and the substrate with the periodic grid-like bulge structure; processing of the substrate: firstly processing a surface of the substrate, then preparing a polymer film layer, next preparing a transition material layer, heating the substrate, and finally preparing a liquid metal layer; adjusting a relative position of the inducing template and the substrate; and molding of electric field-induced molded modulatable liquid grating: heating the substrate, adding a direct-current power supply, cooling to mold a liquid grating structure after a series of modulation processes, and finally removing the inducing template. The liquid grating manufactured in the invention can adjust and control parameters of the grating as needed in real time, and is large in modulation range; the liquid grating avoids dispersion errors caused by surface roughness due to a flowing molded perfect ultra-smooth surface, so that the diffraction efficiency of the grating can be effectively improved.

Description

technical field [0001] The invention relates to the technical field of micro-nano manufacturing, in particular to a manufacturing method of an electric field-induced shaping modulated liquid grating. Background technique [0002] Gratings are diffraction gratings, which are optical components that disperse light by using the principle of diffraction. Micro-manufacturing processes such as mechanical scribing, holographic lithography, and dry etching are fabricated on hard substrate materials such as metal, metal dielectric film, and quartz. According to the actual needs of engineering applications, the correction of the physical properties of the grating is realized, which greatly limits the application of the grating. [0003] Therefore, the development of a modulated grating whose line structure can be controlled according to the needs of use has always been the pursuit of the academic and industrial circles. [0004] A. Q. Liu from Nanyang Technological University in Sin...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G02B5/18
CPCG02B5/1828G02B5/1847
Inventor 史永胜刘红忠尹磊陈邦道
Owner CHANGZHOU RUIFENGTE TECH CO LTD
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com