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Fabrication method of electric field-induced modulating liquid grating

A technology of electric field induction and manufacturing method, applied in the directions of diffraction grating, optics, optical components, etc., can solve the problems of limiting the application of grating, changing the parameters of the line structure, etc., to improve the diffraction efficiency, reduce the effect of scattering, and achieve a large modulation range. Effect

Active Publication Date: 2019-06-21
CHANGZHOU RUIFENGTE TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] The grating is the diffraction grating, which is an optical element that uses the principle of diffraction to disperse light. As the core component of the optical system, it is widely used in the fields of spectroscopic instruments, precision measurement, optical communication, display technology, and laser tuning technology. The traditional diffraction grating is through Micro-manufacturing processes such as mechanical scribing, holographic lithography, and dry etching are produced on hard substrate materials such as metals, metal dielectric films, and quartz. The actual needs of engineering applications are changed, and the physical characteristics of the grating are corrected, which greatly limits the application of the grating

Method used

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  • Fabrication method of electric field-induced modulating liquid grating
  • Fabrication method of electric field-induced modulating liquid grating
  • Fabrication method of electric field-induced modulating liquid grating

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Experimental program
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Effect test

Embodiment 1

[0026] A method for manufacturing an electric field-induced modulating liquid grating, comprising the following steps:

[0027] (1) Preparation of induced template and substrate:

[0028] Such as figure 1 , choose zero-expansion Invar as the material of the induction template 1 and the substrate 2, sputter a layer of chromium layer with a thickness of 200nm on the surface of the induction template 1 and the substrate 2, and use the method of nanoimprinting and reactive ion etching A first periodic grid-like raised structure 3 and a second periodic grid-like raised structure 4 with the same morphology are formed on the inductive template 1 and the substrate 2, the first periodic grid-like raised structure 3 and the second periodic grid-like raised structure 4 The width of the periodic grid-shaped raised structure 4 is 10 μm, and the thickness is 200 nm. The first periodic grid-shaped raised structure 3 and the second periodic grid-shaped raised structure 4 are soldered, conne...

Embodiment 2

[0036] A method for manufacturing an electric field-induced modulating liquid grating, comprising the following steps:

[0037] (1) Preparation of induced template and substrate:

[0038] Such as figure 1, choose zero-expansion Invar as the material of induction template 1 and substrate 2, sputter a layer of chromium layer with a thickness of 190nm on the surface of induction template 1 and substrate 2, and use the method of nanoimprinting and reactive ion etching On the induction template 1 and the substrate 2, a first periodic grid-like raised structure 3 and a second periodic grid-like raised structure 4 with the same shape are formed, and the first periodic grid-like raised structure 3 and the second periodic grid-like raised structure Both the width of the two periodic grid-shaped raised structures 4 are 10 μm, and the thicknesses are both 190 nm. The line is connected to the address switch 5, which is a board-type multi-channel controllable relay array, which can be p...

Embodiment 3

[0046] A method for manufacturing an electric field-induced modulating liquid grating, comprising the following steps:

[0047] (1) Preparation of induced template and substrate:

[0048] Such as figure 1 , select Invar with zero expansion as the material of the induction template 1 and the substrate 2, sputter a layer of chromium layer with a thickness of 210nm on the surface of the induction template 1 and the substrate 2, and use the method of nanoimprinting and reactive ion etching On the induction template 1 and the substrate 2, a first periodic grid-like raised structure 3 and a second periodic grid-like raised structure 4 with the same shape are formed, and the first periodic grid-like raised structure 3 and the second periodic grid-like raised structure Both the width of the two periodic grid-shaped raised structures 4 are 10 μm, and the thicknesses are both 210 nm. The line is connected to the address switch 5, which is a board-type multi-channel controllable relay...

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Abstract

The invention discloses a method for manufacturing an electric field-induced molded modulatable liquid grating. The method comprises the following steps: preparation of an inducing template and a substrate: forming the inducing template with a periodic grid-like bulge structure and the substrate with the periodic grid-like bulge structure; processing of the substrate: firstly processing a surface of the substrate, then preparing a polymer film layer, next preparing a transition material layer, heating the substrate, and finally preparing a liquid metal layer; adjusting a relative position of the inducing template and the substrate; and molding of electric field-induced molded modulatable liquid grating: heating the substrate, adding a direct-current power supply, cooling to mold a liquid grating structure after a series of modulation processes, and finally removing the inducing template. The liquid grating manufactured in the invention can adjust and control parameters of the grating as needed in real time, and is large in modulation range; the liquid grating avoids dispersion errors caused by surface roughness due to a flowing molded perfect ultra-smooth surface, so that the diffraction efficiency of the grating can be effectively improved.

Description

technical field [0001] The invention relates to the technical field of micro-nano manufacturing, in particular to a manufacturing method of an electric field-induced modulating liquid grating. Background technique [0002] The grating is the diffraction grating, which is an optical element that uses the principle of diffraction to disperse light. As the core component of the optical system, it is widely used in the fields of spectroscopic instruments, precision measurement, optical communication, display technology, and laser tuning technology. The traditional diffraction grating is through Micro-manufacturing processes such as mechanical scribing, holographic lithography, and dry etching are produced on hard substrate materials such as metals, metal dielectric films, and quartz. The actual needs of engineering applications are changed, and the physical characteristics of the grating are corrected, which greatly limits the application of the grating. [0003] Therefore, the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/18
CPCG02B5/1828G02B5/1847
Inventor 史永胜刘红忠尹磊陈邦道
Owner CHANGZHOU RUIFENGTE TECH CO LTD
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