Gas supply device and method for multi-working-medium gas micro-flow calibration
A gas supply device and micro-flow technology, which is used in gas/liquid distribution and storage, pipeline systems, mechanical equipment, etc. Problems such as inaccurate micro-flow of working medium gas, to ensure stability, prevent pollution, and achieve the effect of accurate calibration
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[0028] The present invention will be described in detail below with reference to the accompanying drawings and embodiments.
[0029] The present invention provides an air supply device for multi-working medium gas micro-flow calibration. The air supply device includes a multi-working medium gas path conversion system, a voltage stabilization system, a calibration system 26 and an evacuation unit. The multiple working medium gas circuit conversion system includes a gas storage system and an electrical circuit converter.
[0030] The gas storage system is used to provide a variety of calibration gases; the electrical circuit converter is used to ensure that the gas entering the stabilizing system reaches the preset inlet pressure; the stabilizing system is used to provide the calibration gas that reaches the preset outlet pressure; the evacuation unit is used to The air supply unit is evacuated.
[0031] The gas storage system is connected with the voltage stabilization system ...
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