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OLED and film deposition method thereof

A technology of electroluminescent devices and thin film deposition devices, which is applied in the direction of electric solid devices, electrical components, semiconductor devices, etc., can solve problems such as difficulty in ensuring the uniformity of the film, and achieve the effect of small size, uniform film thickness, and complete volatilization

Active Publication Date: 2017-11-17
GUANGDONG JUHUA PRINTING DISPLAY TECH CO LTD
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  • Claims
  • Application Information

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Problems solved by technology

The advantage of using the printing process is that there is no need to vacuum heat the material, but in the drying process of the solution, it is difficult to ensure the uniformity of the material molecules or molecular clusters to form a thin film due to the complex solvent volatilization and solute flow control involved.

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  • OLED and film deposition method thereof
  • OLED and film deposition method thereof

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Embodiment

[0036] The present embodiment is a manufacturing method of an organic electroluminescent device, which comprises an ITO anode, a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer and a cathode stacked in sequence, and its preparation method Including the following steps:

[0037] (1) Anode treatment: The substrate with the ITO electrode was ultrasonically cleaned in an alkaline cleaner and ultrapure water, then dried with nitrogen, vacuum baked at 100°C for 30 minutes, and treated with UV / ozone for 10 seconds.

[0038] (2) Hole injection layer deposition:

[0039] 2.1 Dissolving the hole injection layer material in a solvent to obtain a material solution, wherein the mass concentration of the hole injection layer material is 10 -3 g / L; in the present embodiment, the material of the hole injection layer is an arylamine-based compound QUPD, and the solvent is tetrahydrofuran; understandably, in other embodiments, it can also be ot...

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Abstract

The invention relates to an OLED and a film deposition method thereof. The film deposition method comprises the following steps of: preparing a material solution: dissolving a material to be deposited in a solvent to obtain the material solution; and providing an atomization device comprising an atomization system, a cavity, a vacuum tube and a support plate; and depositing: placing a substrate on the support plate, switching on a vacuum device, vacuuming the cavity through the vacuum tube, and atomizing the material solution through the atomization system to deposit the material solution on the substrate. The film deposition method of the OLED utilizes a combination of vacuum and a spray process to deposit the film of the OLED, does not need to heat and sublimate the material to be deposited at a high temperature, and is suitable for materials hard to sublimate or liable to thermally decompose. Further, droplets formed by spray are small, and the vacuum environment allows the solvent to be uniformly volatilized, thereby forming a uniform film thickness.

Description

technical field [0001] The invention relates to the technical field of displays, in particular to a film deposition method and device for organic electroluminescent devices. Background technique [0002] At present, there are mainly two types of preparation methods for organic electroluminescent devices: one is vacuum thermal evaporation, and the other is solution printing. [0003] When the vacuum thermal evaporation process is used, the material is heated and sublimated into a gaseous state in a high vacuum state, and the gaseous material molecules or molecular clusters diffuse and move to the surface of the substrate to deposit in a vacuum environment. When the substrate is in a uniform evaporation material vapor Under the atmosphere, a uniform film can be obtained. The advantage of using the evaporation process is that it is easy to obtain a film with a very uniform thickness distribution. However, this method requires high-temperature heating of the material to sublim...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56
CPCH10K71/15H10K71/12H10K71/00
Inventor 李哲
Owner GUANGDONG JUHUA PRINTING DISPLAY TECH CO LTD
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