Capacitive flexible pressure sensor and preparation method thereof

Abstract

The present invention discloses a capacitive flexible pressure sensor and a preparation method thereof. The capacitive flexible pressure sensor comprises: a first flexible nanofiber thin layer; a second flexible nanofiber thin layer which is oppositely arranged with the first flexible nanofiber thin layer; a first electrode layer attached to the internal side of the first flexible nanofiber thin layer; a second electrode layer attached to the internal side of the second flexible nanofiber thin layer; and a nanofiber composite film dielectric layer arranged between the first electrode layer and the second electrode layer. The nanofiber thin is utilized to each module of the capacitive flexible pressure sensor to allow the whole sensor to have good permeability and high sensitivity, and the addition of the functional nanofiber materials allow the sensor measuring range to be widened so as to facilitate human body long-time wearing to perform real-time monitoring of human body weak vital sign signals.

Description

technical field [0001] The disclosure belongs to the technical field of pressure sensors, and relates to a capacitive flexible pressure sensor and a preparation method thereof. Background technique [0002] In recent years, wearable tactile sensors have rapidly penetrated into various fields such as smart wear, electronic skin, and intelligent robots. The sensitivity and range of resistive tactile sensors have been greatly improved, while capacitive pressure sensors have achieved low cost and high The characteristics of sensitivity and large range have always been the difficulties in its development. [0003] It is an effective method to improve the performance of the sensor by constructing micro-nano structures on the surface of the film by silicon inverted film method, photolithography, reactive ion beam etching, etc., and making pressure sensors with micro-nano structures. But on the one hand, the instruments for constructing the micro-nano structure are expensive or the...

AI Technical Summary

Problems solved by technology

But on the one hand, the instruments for constructing the micro-nano structure are expensive or the production process is complicated; on the other hand, the pressure range of the micro-nano structure is small, so the high-sensitivity range of the sensor only exists in a small pressure range, which restricts its practical application

Existing capacitive flexible pressure sensors have problems such as single material selection, high sensitivity, small range, cumbersome production process, difficulty in large-area production, and high cost.

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