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Metal-graphene plasmonic device and preparation method for enhanced infrared spectrum detection

A graphene and component technology, applied in the field of infrared detection, can solve the problems of narrow enhancement band, improved repeatability, limited detection capability, etc., and achieve the effects of perfect infrared absorption, high local electromagnetic field enhancement, and improved efficiency.

Active Publication Date: 2020-09-01
THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, at present, this technology has the defects of very narrow enhanced band, greatly limited detection capability, and poor repeatability, and it does not have the universal significance of trace molecular detection.

Method used

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  • Metal-graphene plasmonic device and preparation method for enhanced infrared spectrum detection
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  • Metal-graphene plasmonic device and preparation method for enhanced infrared spectrum detection

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Embodiment 1

[0039] figure 1 It is a longitudinal cross-sectional front view of the device of the present invention having strip-shaped graphene periodic nanostructures 104a.

[0040] A metal-graphene plasmonic device for enhancing infrared spectrum detection without a gold grating layer is provided with a strip-shaped graphene periodic nanostructure, including a substrate 101 arranged sequentially from bottom to top, The reflection layer 102 , the dielectric layer 103 , the graphene film 104 , the source metal layer 105 a and the drain metal layer 105 b, and the substance layer 107 to be detected.

[0041] Wherein, the substrate 101 and the reflective layer 102 are used as a grid, the reflective layer 102 is deposited on the substrate 101, the dielectric layer 103 is deposited on the reflective layer, and the graphene film 104 is covered on the dielectric layer 103 , the source metal layer 105a and the drain metal layer 105b are deposited on the graphene film 104, the source metal layer ...

Embodiment 2

[0050] figure 2 It is a longitudinal cross-sectional front view of a device of the present invention having a graphene periodic nanostructure composed of a graphene film 104 and grooves 104b.

[0051] A metal-graphene plasmonic device for enhancing infrared spectrum detection with a graphene periodic nanostructure composed of a graphene film 104 and a groove 104b is provided, including a substrate 101, which is sequentially arranged from bottom to top, The reflection layer 102 , the dielectric layer 103 , the graphene film 104 , the source metal layer 105 a and the drain metal layer 105 b, and the substance layer 107 to be detected.

[0052] Wherein, the substrate 101 and the reflective layer 102 are used as gate, the reflective layer 102 is deposited on the substrate 101, the dielectric layer 103 is deposited on the reflective layer 102, and the graphene film 104 covers the dielectric layer 103 Above, the source metal layer 105a and the drain metal layer 105b are deposited ...

Embodiment 3

[0060] FIG. 3 is a longitudinal cross-sectional front view of a metal-graphene plasmonic device including a gold grating layer 106 for enhanced infrared spectrum detection.

[0061] A metal-graphene plasmonic device for enhancing infrared spectrum detection including a gold grating layer 106 is provided, including a substrate 101, a reflective layer 102, a dielectric layer 103, and a graphene film 104 arranged in sequence from bottom to top , the source metal layer 105a and the drain metal layer 105b, the gold grating layer 106 and the substance layer 107 to be detected.

[0062] Wherein, the substrate 101 and the reflective layer 102 are used as gate, the reflective layer 102 is deposited on the substrate 101, the dielectric layer 103 is deposited on the reflective layer 102, and the graphene film 104 covers the dielectric layer 103 Above, the source metal layer 105a and the drain metal layer 105b are deposited on the graphene film 104, the source metal layer 105a and the dra...

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Abstract

The present invention provides a metal-graphene plasmon device for enhancing infrared spectrum detection. The device comprises a substrate, a reflective layer, a dielectric layer, a graphene film, a source metal layer, a drain metal layer, a grating layer and a to-be-detected substance layer which are sequentially arranged from bottom to top, wherein the substrate and the reflective layer are taken as a grid, the reflective layer is deposited on the substrate, the dielectric layer is deposited on the reflective layer, the graphene film covers the dielectric layer, and the source metal layer and the drain metal layer are deposited on the graphene film and are connected through graphene; an alternating structure of a graphene periodic nanostructure and a gold grating is arranged in a local region between the source metal layer and the drain metal layer. Compared with other graphene infrared plasmon device structures with low mobility, the device can achieve perfect infrared absorption and greatly enhanced local electromagnetic field, and efficiency of infrared spectroscopy in trace substance detection is improved.

Description

technical field [0001] The invention relates to the technical field of infrared detection, in particular to a metal-graphene grating sensor device and a preparation method for enhancing molecular infrared absorption on the surface of plasmons. Background technique [0002] Infrared radiation contains rich objective information, and its detection has attracted much attention. Infrared detectors have covered short-wave, medium-wave and long-wave ranges, and have been widely used in military and civilian fields. Its detection principle is to use the photoelectric conversion performance of the material to convert the photon signal of infrared radiation into an electronic signal, and combine it with an external circuit to achieve the goal of detecting infrared light signals. [0003] Infrared spectroscopy is a technology and method that directly detects molecular vibration modes to realize characteristic identification and quantitative analysis of substances. This technology ha...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/35G01N21/552B82Y35/00B82Y40/00
Inventor 戴庆郭相东杨晓霞胡德波
Owner THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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