Coupling structure with silicon nanowire waveguide and fiber and manufacturing method thereof

Abstract

The invention discloses a coupling structure with a silicon nanowire waveguide and a fiber and a manufacturing method thereof. The coupling structure comprises a first silicon dioxide waveguide beingan input waveguide, a tapered silicon dioxide waveguide, a second silicon dioxide waveguide, a silicon dioxide flat-panel structure, a tapered silicon waveguide, and a silicon output waveguide. One side of the tapered silicon dioxide waveguide is connected with the first silicon dioxide waveguide and the dimension of the cross section is reduced gradually along the light transmission direction; the second silicon dioxide waveguide is connected with the other side of the tapered silicon waveguide and the dimension of the cross section of the second silicon dioxide waveguide is smaller than thatof the first silicon dioxide waveguide; the silicon dioxide flat-panel structure is connected with the second silicon dioxide waveguide; the tapered silicon waveguide coated by the second silicon dioxide waveguide is arranged at a symmetric axis of the second silicon dioxide waveguide and has the cross section with the dimension extending gradually along the light transmission direction; and thesilicon output waveguide coated by the silicon dioxide flat-panel structure is arranged at a symmetric axis of the silicon dioxide flat-panel structure and is connected with the tapered silicon waveguide. The simple coupling structure is designed to be convenient and is manufactured easily with low cost; and large-scale production and application of the coupling structure can be realized easily.

Description

technical field [0001] The disclosure belongs to the technical field of optical fiber communication and integrated optics, and relates to a silicon nanowire waveguide and optical fiber coupling structure and a manufacturing method thereof. Background technique [0002] Traditional waveguides with large cross-sections are usually on the order of hundreds of microns to millimeters. Due to their large bending radii, it is difficult to integrate multiple optical functional devices on a single wafer, which limits the development of large-scale integrated optical circuits. With the advancement of semiconductor processing, silicon nanowire optical waveguides and devices have become one of the hot research fields today. Silicon nanowire waveguides are usually made of silicon SOI (Silicon-on-insulator, SOI) substrates. The refractive index difference between the core layer and the cladding layer is very large, which can form a strong confinement of the optical field, so as to realize...

AI Technical Summary

Problems solved by technology

The difference in size between the two makes the loss of direct butt coupling greater than 10dB, which cannot meet the needs of practical applications

[0004] In order to solve the coupling problem between silicon nanowire waveguides and optical fibers, one method is to use a grating coupling structure. Although this method can directly couple with single-mode optical fibers, the bandwidth is limited and the optical fiber needs to maintain a specific angle, which is not conducive to large-scale applications.

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