Silicon-sapphire pressure sensor sensitive structure with self-protection function

Abstract

The invention belongs to the technical field of sensor optimization design in advanced sensor technology research, and in particular to a silicon-sapphire pressure sensor sensitive structure with a self-protection function. The silicon-sapphire pressure sensor sensitive structure having the self-protection function is mainly used for solving the problem that a sensor sensitive diaphragm is damageddue to the fact that the pressure exceeds the range during high-pressure measurement, and the failure of the sensor is further caused. The sensor structure mainly comprises a titanium alloy shell, atitanium alloy strain diaphragm, a sapphire diaphragm, a monocrystalline silicon strain resistor, a titanium alloy protective diaphragm, a metal lead wire, and a support. The monocrystalline silicon strain resistor is arranged on the sapphire diaphragm, the monocrystalline silicon strain resistor and the sapphire diaphragm are connected to form an electric bridge through the metal lead wire, and the metal lead wire is led out of the sensor shell. The double-diaphragm structure is adopted, so that the pressure sensor sensitive diaphragm can be effectively protected, and the pressure sensor sensitive diaphragm can be prevented from being damaged when the measured pressure exceeds the range of the pressure range.

Description

technical field [0001] The invention belongs to the technical field of sensor optimization design in advanced sensor technology research, and in particular relates to a silicon-sapphire pressure sensor sensitive structure with self-protection function. Background technique [0002] High temperature and high pressure sensors play a vital role in the industrial and military fields. These sensors generally require high temperature resistance, high pressure resistance, and vibration resistance. Due to the complexity of the test environment, the pressure sensor often has to work under overpressure, and the sensitive diaphragm of the sensor is generally a thin film. When the deformation exceeds a certain range, the diaphragm will be damaged and the sensor will fail. The failure of the pressure sensor during the working process will not only increase the maintenance cost, but also may have a devastating blow to the entire system. Therefore, it is of great significance to study high...

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Problems solved by technology

However, in actual situations, the measured pressure often exceeds the pressure range by more than 2 times, so the sensor may still fail

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