Metal plate film plating method and device

Abstract

A metal plate film plating method is characterized by being implemented in arranged devices such as material libraries, an ion plating chamber and a third vacuum chamber; 2-20 metal baseplates are arranged in a first vacuum chamber to serve as the material libraries; a track-variable metal baseplate circulating transmission system is arranged between the material libraries and the interconnected ion plating chamber as well as between the material libraries and the third vacuum chamber; the film plating operation is performed on the track-variable metal baseplate circulating transmission systemthrough a second vacuum film plating chamber, namely the ion plating chamber; titanium is adopted as a target material in the ion plating chamber; a hard film plating layer is made of a carbide alloyor a boride alloy; a metal baseplate is circulated on variable tracks in the material libraries, the interconnected ion plating chamber and the third vacuum chamber for several times, and subjected to the continuous circulating film plating operation on first and second transverse tracks of the ion plating chamber for several times; the circulation of the metal baseplate is supported and driven by a plurality of V-shaped wheels and a plurality of groups of clamping wheels of an upper track; the baseplate is directly supported by V-shaped grooves of the V-shaped wheels; the V-shaped wheels comprise driving wheels and driven wheels; and the baseplate is driven in such a manner that the V-shaped wheels rotate rather than rolling.

Description

technical field [0001] The invention relates to a metal plate coating method, in particular to a metal plate ion vacuum coating method and device. Background technique [0002] CN 102352481 is a method and device for ion vacuum coating on metal plates proposed by the inventor --------- using a magnetron columnar arc source multi-arc ion coating (physical plating or ion plating), the device is in A magnetron columnar arc source (tubular metal target) is installed in the center of the coating chamber. It consists of a vacuum coating chamber, a workpiece turret, a magnetron columnar arc source, an air intake (different working gases need to be introduced after vacuuming when plating different materials) system, a magnetron columnar arc source power supply, a workpiece heating source, and an arc ignition system. , Vacuum system, workpiece bias power supply. The column arc source is made of tubular metal material as the target material, and several bar-shaped permanent magnets ...

AI Technical Summary

Problems solved by technology

Therefore, the successful precedent of stainless steel molded plate made of stainless steel, especially 304 material, vacuum-plated with a hard film layer of 2-8 microns without deformation, has not been reported before.

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