Chip-size wafer-level scale packaged dynamic random access memory and manufacturing method therefor
A dynamic random, chip size technology, applied in semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, electrical solid-state devices, etc., can solve the problems of increasing the manufacturing cost of dynamic random access memory, power consumption, signal noise, thermal problems, etc.
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[0056] According to one embodiment of the present invention, the method includes the following steps:
[0057] Step 1, such as Figure 4 and Figure 5 As shown, a plurality of the first main chips 11A are laminated and fixed together, and a first through-silicon via 13A is provided on the first main chip 11A;
[0058] Step two, such as Figure 6 and Figure 7 As shown, the control chip 12 is stacked and fixed above the plurality of first main chips 11A, and a third through-silicon via 13C is provided on the control chip 12;
[0059] Step three, such as Figure 8 to Figure 10 As shown, a plurality of second main chips 11B are stacked and fixed layer by layer above the control chip 12, and second through-silicon vias 13B are provided on the second main chip 11B,
[0060] Wherein, the method further includes connecting the second through-silicon vias 13B of the adjacent second main chip 11B to each other and communicating with the control chip 12; making the first through-si...
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