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Chip-size wafer-level scale packaged dynamic random access memory and manufacturing method therefor

A dynamic random, chip size technology, applied in semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, electrical solid-state devices, etc., can solve the problems of increasing the manufacturing cost of dynamic random access memory, power consumption, signal noise, thermal problems, etc.

Active Publication Date: 2018-02-23
CHANGXIN MEMORY TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this kind of dynamic random access memory can greatly improve the storage capacity of the storage device, because the control chip 2 is usually located at the top or bottom of multiple main chips 1, the connection distance between some main chips 1 and the control chips 2 is too long, and The distances between each main chip 1 and the control chip 2 are different, resulting in a signal transmission delay between the main chip 1 and the control chip 2, which greatly increases the power consumption and signal noise of the DRAM, and also causes heat dissipation. The emergence of problems
In addition, the use of the micro-bump 4 will greatly increase the manufacturing cost of the DRAM
[0004] Therefore, it is necessary to provide a dynamic random access memory that can solve the above-mentioned problems such as signal transmission delay, power consumption and signal noise increase, and has low manufacturing cost.

Method used

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  • Chip-size wafer-level scale packaged dynamic random access memory and manufacturing method therefor
  • Chip-size wafer-level scale packaged dynamic random access memory and manufacturing method therefor
  • Chip-size wafer-level scale packaged dynamic random access memory and manufacturing method therefor

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Embodiment approach

[0056] According to one embodiment of the present invention, the method includes the following steps:

[0057] Step 1, such as Figure 4 and Figure 5 As shown, a plurality of the first main chips 11A are laminated and fixed together, and a first through-silicon via 13A is provided on the first main chip 11A;

[0058] Step two, such as Figure 6 and Figure 7 As shown, the control chip 12 is stacked and fixed above the plurality of first main chips 11A, and a third through-silicon via 13C is provided on the control chip 12;

[0059] Step three, such as Figure 8 to Figure 10 As shown, a plurality of second main chips 11B are stacked and fixed layer by layer above the control chip 12, and second through-silicon vias 13B are provided on the second main chip 11B,

[0060] Wherein, the method further includes connecting the second through-silicon vias 13B of the adjacent second main chip 11B to each other and communicating with the control chip 12; making the first through-si...

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PUM

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Abstract

The invention relates to the field of semiconductor packaging, and discloses a chip-size wafer-level scale packaged dynamic random access memory and a manufacturing method therefor. The dynamic randomaccess memory comprises a stacked chip; the stacked chip comprises main chips and a control chip; and the main chips and the control chip are arranged in a stacked manner and the control chip is stacked between the two main chips. By enabling the control chip to be stacked between the two main chips of the stacked chip, particularly in the middle layer position of the stacked chip, the maximum connection distance between each main chip and the control chip can be obviously shortened, thereby effectively accelerating signal transfer between the chips; and meanwhile, the problems of signal noise and heating of the dynamic random access memory can be well controlled conveniently.

Description

technical field [0001] The invention relates to the field of semiconductor packaging, in particular to a chip-sized wafer-level scale packaged dynamic random access memory (DRAM) and a manufacturing method thereof. Background technique [0002] DRAM (Dynamic Random Access Memory) is a common system memory. [0003] Currently used dynamic random access memory, such as figure 1 As shown, it includes a plurality of main chips 1 stacked on each other, a control chip 2 located above the multiple main chips 1, and a ball grid array 3 packaged above the control chip 2, wherein the multiple main chips 1 are connected to each other through silicon vias 5 , multiple main chips 1 and control chips 2 are connected through micro-bumps 4 . Although this kind of dynamic random access memory can greatly improve the storage capacity of the storage device, because the control chip 2 is usually located at the top or bottom of multiple main chips 1, the connection distance between some main c...

Claims

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Application Information

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IPC IPC(8): H01L23/48H01L25/18H01L21/60
CPCH01L23/481H01L24/82H01L25/18
Inventor 不公告发明人
Owner CHANGXIN MEMORY TECH INC
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