Unlock instant, AI-driven research and patent intelligence for your innovation.

Shaped Heater and Thermal Field Structure of Single Crystal Pulling Furnace

A heater and pulling furnace technology, applied in the direction of single crystal growth, single crystal growth, self-melting liquid pulling method, etc., can solve the problems of waste of graphite material and difficulty in precise control of the control system, so as to reduce the loss and reduce the The effect of the control system

Active Publication Date: 2020-11-27
ZING SEMICON CORP
View PDF8 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a special-shaped heater and a thermal field structure of a single crystal pulling furnace, which is used to solve the problem that the thermal field structure of a single crystal pulling furnace adopts a regular shape in the prior art. The combination of the main heater and the bottom heater can accurately control the temperature field, and the existing control system is difficult to accurately control, resulting in the waste of graphite materials in some areas.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Shaped Heater and Thermal Field Structure of Single Crystal Pulling Furnace
  • Shaped Heater and Thermal Field Structure of Single Crystal Pulling Furnace
  • Shaped Heater and Thermal Field Structure of Single Crystal Pulling Furnace

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] see figure 2 , the present invention provides a special-shaped heater 20, the special-shaped heater 20 is suitable for heating the crucible in the thermal field structure of a single crystal pulling furnace, the special-shaped heater 20 includes a heater main body 201, and the heater The main body 201 includes a first part and a second part located below the first part and connected to the first part; the thickness of the first part 2011 of the heater main body gradually increases from top to bottom.

[0048] As an example, the shaped heater 20 may be, but not limited to, a graphite heater.

[0049] As an example, the first part 2011 of the heater body and the second part 2012 of the heater body are integrally formed, that is, the first part 2011 of the heater body and the second part 2012 of the heater body are integrally formed.

[0050] As an example, the junction of the heater body first portion 2011 and the heater body second portion 2012 is close to the bottom o...

Embodiment 2

[0060] see image 3 , the present invention also provides a single crystal pulling furnace thermal field structure, the single crystal silicon pulling furnace thermal field structure includes: a furnace body 21; a crucible 22, the crucible 22 is located in the furnace body 21; as implemented For the special-shaped heater 20 described in Example 1, the special-shaped heater 20 is located inside the furnace body 21 and on the periphery of the crucible 22 . For the specific structure of the special-shaped heater 20 , please refer to Embodiment 1, which will not be repeated here.

[0061] As an example, the crucible 22 includes a graphite crucible 221 and a quartz crucible 222 , and the quartz crucible 222 is located in the graphite crucible 221 .

[0062] As an example, the thermal field structure of the single crystal silicon pulling furnace further includes: a heat shield 23, the heat shield 23 is located in the furnace body 21 and above the crucible 22; a graphite structure 2...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a special-shaped heater and a monocrystal pulling furnace heat field structure. The special-shaped heater is applicable to heating a crucible in the monocrystal pulling furnaceheat field structure. The special-shaped heater comprises a heater main body, wherein the heater main body comprises a first part and a second part located below the first part and connected with thefirst part; and the thickness of the first part of the heater main body is increased gradually from the top down. According to the special-shaped heater, the thicknesses of different positions of theheater main body are different according to actual temperature distribution requirements; the loss of a heater material can be effectively reduced; with the adoption of a bulge extending to the bottomof the crucible, the bulge and the heater main body with the different thicknesses are combined into a whole for heating; temperature distribution in the monocrystal pulling furnace heat field structure can be accurately controlled; a bottom heater is not required to be matched for use; and a control system is removed.

Description

technical field [0001] The invention belongs to the technical field of semiconductor equipment, and in particular relates to a special-shaped heater and a thermal field structure of a single crystal pulling furnace. Background technique [0002] In the process of preparing large-size silicon single crystals by the Czochralski method, the thermal field structure of the single crystal pulling furnace used is as follows: figure 1 As shown, the graphite heater, as a key component of the thermal field, directly affects the temperature distribution of the thermal field during the crystal growth process; at present, the main heater 12 located on the side of the crucible 11 and the The combination of the bottom heater 13 at the bottom of the crucible 11 realizes precise control of the temperature field, wherein the main heater 12 is a relatively regular heater, that is, the thickness of each part of the main heater 12 is almost the same. However, this not only adds a heater control...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C30B15/14C30B29/06C30B15/10
CPCC30B15/10C30B15/14C30B29/06
Inventor 邓先亮
Owner ZING SEMICON CORP