Mask

Abstract

The invention relates to a mask. The mask comprises a dummy zone and at least one effective evaporation zone; the dummy zone is arranged outside the at least one effective evaporation zone; a plurality of first through holes are formed in the at least one effective evaporation zone; a plurality of second through holes are formed in the dummy zone; the second through holes and the first through holes are identical in shape and equal in size; and the distance among the second through holes is equal to that among the first through holes. The second through holes are formed in the dummy zone outside the at least one effective evaporation zone, and the second through holes and the first through holes are identical in shape, size and distance, so that the dummy zone has the same mechanical properties as the at least one effective evaporation zone and has the same stress characteristic as the at least one effective evaporation zone, wrinkles are not produced easily between the dummy zone andthe at least one effective evaporation zone, pixel color mixing is effectively avoided, the evaporation effect is better, and the yield of active-matrix organic light emitting diodes (AMOLEDs) is increased.

Description

technical field [0001] The invention relates to the technical field of organic light-emitting display manufacturing, in particular to a mask plate. Background technique [0002] In the AMOLED (Active-matrix organic light emitting diode, active matrix organic light emitting diode) production process, the process that most affects the yield is the evaporation process. The basic process of the evaporation process is to heat the organic material to evaporate the organic material. And the through hole etched through the high-precision fine mask plate is evaporated on the glass substrate to form a light-emitting unit. [0003] High-precision fine mask plates are usually produced by etching methods. The thickness of the high-precision fine mask plate is ≤40um. Because of its small thickness, the traditional high-precision fine mask plate is very soft and easily deformed. In order to prevent the deformation of the mask plate, the current traditional design of the high-precision fi...

AI Technical Summary

Problems solved by technology

The thickness of the high-precision fine mask plate is ≤40um. Due to its small thickness, the traditional high-precision fine mask plate is very soft and easily deformed

In order to prevent the deformation of the mask plate, the current traditional high-precision fine mask plate design usually needs to set a dummy (reserved) area outside the effective area of ​​​​evaporation. Deformation under the action of tension force; however, the traditional high-precision fine mask design scheme has a solid part that is not etched between the effective area and Dummy, resulting in different mechanical performance parameters of the high-precision fine mask plate. Wrinkles are prone to occur under the influence of tension on the net. Wrinkles will cause color mixing of evaporated products, and color mixing will seriously affect the yield of AMOLED.

Images