Non-gel double-faced flexible copper clad laminate production equipment

Abstract

The invention discloses non-gel double-faced flexible copper clad laminate production equipment. The non-gel double-faced flexible copper clad laminate production equipment comprises a vacuum cavity and winding and unwinding systems. A target electrode vehicle is arranged on one side of the vacuum cavity, a target electrode is arranged on the target electrode vehicle, and a second sealing elementis arranged between the target electrode vehicle and the vacuum cavity. The non-gel double-faced flexible copper clad laminate production equipment has the beneficial effects that (1) the cavity is ina circular shape, an air exhaust dead angle cannot be formed, and the vacuum degree is even; a vacuum obtaining system is a molecular pump oil-free system, and it is ensured that no return oil existsin a vacuum chamber; a configured cryogenic pump can increase the pumping speed of base material air bleeding in the continuous film plating process, and therefore the working efficiency is improved;(2) the double winding and unwinding systems are adopted, the requirements for full-width one-roll double-faced plating and two-roll single-faced plating of a magnetron sputtering area can be met, the requirements for half-width two-roll single-faced plating and double-faced plating of a plating area can further be met, and the functions are comprehensive; and (3) an ion source treatment device is arranged at the position entering the magnetron sputtering area, ion bombardment is conducted on the surface of a base material, the roughness of the surface of the base material is improved, and the peel strength of a film and the base material is ensured.

Description

technical field [0001] The invention relates to the technical field of production equipment for copper-clad laminates, in particular to production equipment for non-adhesive double-sided flexible copper-clad laminates. Background technique [0002] With the development of electronic products towards short, small, light, thin, and beautiful, flexible printed circuits play an important role in the miniaturization and high reliability of electronic equipment due to their advantages such as bendability, three-dimensional wiring, and three-dimensional interconnection. Playing an increasingly important role, it has been widely used in automobiles, telephones, toys, home appliances, computers, cameras, instruments and other related industries. Against this background, higher expectations have been placed on flexible printed circuit boards. Flexible copper clad laminate is the main material for the production of flexible printed circuit boards, so the production process of flexible...

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Problems solved by technology

[0011] (1) The vacuum chamber of the coating machine usually adopts a square chamber, and the vacuum acquisition system adopts an oil diffusion pump system, which is distributed on both sides of the vacuum chamber. This layout causes uneven vacuum in the vacuum chamber, which leads to sputtering film formation The thickness is not uniform; the oil diffusion pump often has oil return phenomenon, which will form an oil film on the substrate of the workpiece in the vacuum chamber, resulting in poor bonding between the sputtering film layer and the substrate; in addition, the oil diff

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