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Non-gel double-faced flexible copper clad laminate production equipment

A technology for flexible copper clad laminates and production equipment, which is applied in the field of adhesive-free double-sided flexible copper clad laminate production equipment, can solve problems such as low work efficiency, uneven vacuum degree, and large energy consumption, so as to improve work efficiency and vacuum degree Uniform and improved pumping speed

Inactive Publication Date: 2018-03-27
深圳市西陆光电技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] (1) The vacuum chamber of the coating machine usually adopts a square chamber, and the vacuum acquisition system adopts an oil diffusion pump system, which is distributed on both sides of the vacuum chamber. This layout causes uneven vacuum in the vacuum chamber, which leads to sputtering film formation The thickness is not uniform; the oil diffusion pump often has oil return phenomenon, which will form an oil film on the substrate of the workpiece in the vacuum chamber, resulting in poor bonding between the sputtering film layer and the substrate; in addition, the oil diffusion pump consumes a lot of power, due to Its control method is switch value control, so even if the pumping speed of the process becomes small, it can only output full power, and the energy consumption is very large
[0012] (2) Usually only one set of rewinding and unwinding system is configured, so only one roll can be sputtered, and the work efficiency is low
[0013] (3) Usually, it is only equipped with sputtering targets, and not equipped with ion source treatment. When plating certain substrates, the peeling strength between the film layer and the substrate will be insufficient.

Method used

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  • Non-gel double-faced flexible copper clad laminate production equipment
  • Non-gel double-faced flexible copper clad laminate production equipment
  • Non-gel double-faced flexible copper clad laminate production equipment

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Embodiment Construction

[0038] Below in conjunction with embodiment and accompanying drawing, the present invention will be further described:

[0039] Such as Figure 1-Figure 4As shown, an adhesive-free double-sided flexible copper-clad laminate production equipment includes a vacuum chamber 16 and a rewinding and unwinding system 15. A target cart 14 is arranged on one side of the vacuum chamber 16, and a target cart 14 is mounted on the target cart 14. A target 7 is provided, a second seal 22 is provided between the target cart 14 and the vacuum chamber 16, and a rear flange is provided on the side of the vacuum chamber 16 close to the target cart 14 13. The other side of the vacuum chamber 16 is provided with the winding and unwinding system 15, and a first sealing member 21 is provided between the winding and unwinding system 15 and the vacuum chamber 16, and the winding and unwinding system 15 A sliding seat 18 is provided under the system 15 and the target vehicle 14, a drive motor 20 is arr...

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Abstract

The invention discloses non-gel double-faced flexible copper clad laminate production equipment. The non-gel double-faced flexible copper clad laminate production equipment comprises a vacuum cavity and winding and unwinding systems. A target electrode vehicle is arranged on one side of the vacuum cavity, a target electrode is arranged on the target electrode vehicle, and a second sealing elementis arranged between the target electrode vehicle and the vacuum cavity. The non-gel double-faced flexible copper clad laminate production equipment has the beneficial effects that (1) the cavity is ina circular shape, an air exhaust dead angle cannot be formed, and the vacuum degree is even; a vacuum obtaining system is a molecular pump oil-free system, and it is ensured that no return oil existsin a vacuum chamber; a configured cryogenic pump can increase the pumping speed of base material air bleeding in the continuous film plating process, and therefore the working efficiency is improved;(2) the double winding and unwinding systems are adopted, the requirements for full-width one-roll double-faced plating and two-roll single-faced plating of a magnetron sputtering area can be met, the requirements for half-width two-roll single-faced plating and double-faced plating of a plating area can further be met, and the functions are comprehensive; and (3) an ion source treatment device is arranged at the position entering the magnetron sputtering area, ion bombardment is conducted on the surface of a base material, the roughness of the surface of the base material is improved, and the peel strength of a film and the base material is ensured.

Description

technical field [0001] The invention relates to the technical field of production equipment for copper-clad laminates, in particular to production equipment for non-adhesive double-sided flexible copper-clad laminates. Background technique [0002] With the development of electronic products towards short, small, light, thin, and beautiful, flexible printed circuits play an important role in the miniaturization and high reliability of electronic equipment due to their advantages such as bendability, three-dimensional wiring, and three-dimensional interconnection. Playing an increasingly important role, it has been widely used in automobiles, telephones, toys, home appliances, computers, cameras, instruments and other related industries. Against this background, higher expectations have been placed on flexible printed circuit boards. Flexible copper clad laminate is the main material for the production of flexible printed circuit boards, so the production process of flexible...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/56
CPCC23C14/35C23C14/3442C23C14/562C23C14/564
Inventor 林壁鹏
Owner 深圳市西陆光电技术有限公司
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