A kind of alcrtisicn coating structure and preparation method thereof
A technology of coating and transition layer, applied in the direction of coating, metal material coating process, vacuum evaporation coating, etc., can solve the problems of not meeting cutting conditions, limiting the application of cutting tools, low hardness of TiN coating, etc. Hardness and strength, improved coating toughness, good wear resistance
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[0023] The technical solutions of the present invention will be further described below in conjunction with specific embodiments.
[0024] Firstly, the background vacuum of the vacuum chamber is evacuated to 4.0×10 -3 Pa, and preheated to 500°C, then apply -800V DC bias voltage, flow argon gas into the vacuum chamber with a flow rate of 150 sccm, and perform glow discharge cleaning on the surface of the substrate, keep the working pressure at 2.4Pa, and discharge cleaning for 10 minutes;
[0025] Then lower the argon flow rate to 70sccm, and the working pressure drops to 0.8Pa (because the too high pressure in the transition layer will cause the ions to sputter back, and the ions are not easy to deposit, 0.8pa is the best deposition pressure when depositing the transition layer) , turn on the power of AlCr target and AlTi target at the same time, the target composition Ti30Al70, Cr30Al70 (atomic ratio, that is, the Cr atoms in the AlCr target account for 30%, the Al atoms acco...
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