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Manufacturing method and device of three-dimensional minute metal structural additive

A metal structure and additive manufacturing technology, applied in the field of additive manufacturing, can solve the problems of insufficient mechanical properties, difficult control, large porosity, etc., and achieve the effects of low cost, high processing accuracy and high efficiency

Active Publication Date: 2018-04-20
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Li Yong from Tsinghua University et al. used ultrashort pulse power supply for fine electrochemical deposition (Y.Li, Y.Zheng, G.Yang, L.Peng, Localized electrochemical micromachining with gap control. Sensors & Actuators A Physical, 1008, 144-148 (2003 ).), but this method needs to precisely control the distance between the electrode and the substrate to several microns, which is difficult to control
[0004] At present, the main problems of electrodeposited three-dimensional fine metal structures are relatively loose structure, large porosity, and insufficient mechanical properties.

Method used

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  • Manufacturing method and device of three-dimensional minute metal structural additive
  • Manufacturing method and device of three-dimensional minute metal structural additive
  • Manufacturing method and device of three-dimensional minute metal structural additive

Examples

Experimental program
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Effect test

Embodiment 1

[0087] Example 1 Manufacture of three-dimensional fine metal structure additive

[0088] The schematic diagram of the manufacturing method of the three-dimensional fine metal structure additive in this embodiment is as follows figure 1 shown.

[0089] In this embodiment, the manufacturing method of three-dimensional fine metal structure additive includes:

[0090] (1) The laser beam 62 is focused by the focusing lens 60 and injected into the liquid core fiber 464 , and the laser beam 62 is transmitted to the surface electrodeposition area of ​​the substrate 2 by using the internal total reflection of the liquid core fiber 464 / electroforming solution 40 interface.

[0091] Wherein, the liquid-core optical fiber 464 is installed in the metal conduit 462 . The side wall of the metal conduit 462 is insulated by electrostatic spraying, that is, the outer wall of the metal conduit 462 is coated with an insulating layer 460, which is beneficial to reduce the influence of stray cur...

Embodiment 2

[0097] Example 2 Manufacture of three-dimensional fine metal structure additive

[0098]In this embodiment, the side wall of the metal conduit 462 is insulated by chemical deposition (CVD); the thickness of the oxide layer / photoresist film is 0.1-10 μm; the liquid-core optical fiber and the metal capillary wrapping the liquid-core optical fiber A tool electrode is formed; the rest are the same as in Embodiment 1.

Embodiment 3

[0099] Example 3 Manufacture of three-dimensional fine metal structure additive

[0100] The laser energy used in this embodiment>10 4 W / cm 2 , to melt the deposited metal, to realize the melting and coagulation of metal materials, which is beneficial to reduce the porosity of the electrodeposited structure, thereby improving the compactness and mechanical properties of the electrodeposited microstructure; the thickness of the oxide layer / photoresist film Be 10 μm; All the other are the same as embodiment 1.

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Abstract

The invention discloses a manufacturing method of a three-dimensional minute metal structural additive. The manufacturing method at least comprises the following steps that a substrate is subjected tolaser radiation and electrolytic deposition treatment at the same time, and a three-dimensional minute metal structure is manufactured on the substrate in an additive mode; and at least one zone on the surface of the substrate contains a shielding layer. The method has the advantages that the precision of minute structure electrolytic deposition can be improved; the temperature of a part of electroforming liquid in an action zone is increased through a laser photothermal effect, and improvement of the efficiency of minute metal structure electrochemical deposition is facilitated; when the laser energy is large, the laser energy enables the deposited metal to be molten, fusion and coagulation of a metal material are achieved, and improvement of the compactness and the mechanical performance of the electrolytic deposited minute structure is facilitated.

Description

technical field [0001] The present application relates to a method for manufacturing a three-dimensional fine metal structure additive and a manufacturing device thereof, belonging to the field of additive manufacturing. Background technique [0002] Micro Electro Mechanical System (MEMS) is one of the fastest-growing technical research fields since the 1990s, which has had a huge impact on aviation, aerospace, automobile, bioengineering, information, network and medical systems, etc. It has promoted the rapid development of various industries and caused qualitative changes and leaps in many industrial products. Three-dimensional metal microstructures are widely used in MEMS and are the basis and core of MEMS, such as inertial measurement components, inkjet print head nozzles, microfluidic channels, etc. [0003] Electrodeposition is an advanced technology for manufacturing fine metal structures based on the principle of electrochemical cathodic deposition. It has the advan...

Claims

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Application Information

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IPC IPC(8): C25D1/00B33Y10/00B33Y30/00
CPCB33Y10/00B33Y30/00C25D1/003
Inventor 张文武王玉峰
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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