Corrugated moving electrode capacitive pressure sensor

Abstract

The invention discloses a corrugated moving electrode capacitive pressure sensor, and solves problems that the vacuum degree is affected by a condition that the gas in a ceramic insulator of a conventional capacitive pressure sensor is liable to adhere, and the generated stray capacitance and edge effect affect the measurement stability. The sensor comprises a housing, a fixed electrode insulator,an outer electrode and a moving electrode, wherein the fixed electrode insulator, the outer electrode and the moving electrode are assembled in the housing. The technical main points of the sensor are that the housing consists of a constant-elasticity support sleeve which achieves the matched fused sealing of the fixed electrode insulator, and a support seat with a voltage leading port; the corrugated moving electrode made of a corrugated elastic membrane is fixedly clamped by the constant-elasticity support sleeve and the support seat; a corrugated groove on the surface of the fixed electrode insulator is coated with a metal film conductive layer and an insulating film layer. The sensor is reasonable in structural design, is simple in manufacturing technology step, is easy to manufacture, is high in production efficiency, and facilitates the processing of the membrane and the reduction of diffusion gas leakage rate. Compared with a product of the same type, the finished sensor is resistant to corrosion, is reliable in use, does not need to be zeroed for a long time, and remarkably improves the measurement stability and measurement precision.

Description

technical field [0001] The invention relates to a capacitive pressure sensor, in particular to a capacitive pressure sensor with corrugated moving electrodes suitable for measuring the micro pressure and absolute micro pressure of gas medium. Background technique [0002] Since the capacitive pressure sensor has the advantage of measuring small and micro pressure, there are many kinds of capacitive pressure sensors, about several hundred. The most representative one is the 626 capacitive absolute pressure sensor of the American MKS company (such as Figure 3-4 shown). It includes film moving electrode 8, ceramic insulator 9, internal electrode 10, conductive metal film layer 11, insulating film layer 12, fixed electrode shell 13, positioning ring 14, compression spring 15, getter 16, lead-out electrode 17, molten glass 18. Glass insulator shell 19, upper gland plate 20, support 21 with pressure introduction port, filter and damper 22 and other parts. Because of the existen...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a capacitive pressure sensor with a corrugated moving electrode, which solves the problems that the gas in the ceramic insulator of the existing capacitive pressure sensor is easy to adhere, affects the vacuum degree, and the generated parasitic capacitance and edge effects affect the measurement stability. Its structural design is reasonable, the production process steps are simple, easy to manufacture, high production efficiency, which is beneficial to the processing of the diaphragm and reduces the diffusive air leakage rate. Compared with similar products, the finished product is corrosion-resistant, reliable in use, and does not need to be adjusted for a long time. Zero point, significantly improving the stability and accuracy of measurement

Images