Synchronous motion roundness error separation device and method

A roundness error and error separation technology, which is applied in the field of precision instrument manufacturing and measurement, can solve the problems of model principle error, spindle radial rotation error separation error separation of ultra-precision roundness measuring instruments, turntable radial rotation error, and complicated calculation. , to achieve the effect of few calculation steps, fast detection speed and simple calculation
CN108036751AActive Publication Date: 2018-05-15浙理氢能(杭州)科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
浙理氢能(杭州)科技有限公司
Publication Date
2018-05-15

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Abstract

The invention provides a synchronous motion roundness error separation device and method, which belongs to the technical field of precision instrument manufacturing and measurement. According to the method, an error separation turntable which can follow to rotate in the same direction as the rotation spindle of an ultra-precision roundness error measuring instrument is introduced in the ultra-precision roundness measuring instrument; and through three measurements of a circumferential signal containing different system components, any one of the roundness error of a tested part, the radial rotation error of the spindle of the ultra-precision roundness measuring instrument and the radial rotation error of the error separation turntable is separated. Compared with the most widely used multi-step method, the method solves a problem completely in the airspace, does not involve the Fourier transform, completely avoids harmonic suppression, has the advantage of simple measurement and calculation process, prevents model errors, and provides a new idea for ultra-precision roundness error separation.
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Description

technical field

[0001] The invention is based on a synchronous movement type roundness error separation device and method, belonging to the technical field of precision instrument manufacturing and measurement. Background technique

[0002] In recent years, the continuous development of the field of ultra-precision machining has directly led to the lack of corresponding testing equipment for the processing accuracy of many processing equipment, so that the processing accuracy cannot be further improved. Taking roundness as an example, the roundness error of modern astronomical telescopes has reached ±5nm, the roundness of gyroscopes on spaceships is required to be less than 10nm, and the roundness error of any cross-section of silicon crystal balls with high-precision density references has reached within 10nm. The radial rotation error of the instrument spindle of the highest-precision roundness measuring instrument is also about ±10nm, which makes it impossible to measure ...

Claims

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