Synchronous motion roundness error separation device and method

Abstract

The invention provides a synchronous motion roundness error separation device and method, which belongs to the technical field of precision instrument manufacturing and measurement. According to the method, an error separation turntable which can follow to rotate in the same direction as the rotation spindle of an ultra-precision roundness error measuring instrument is introduced in the ultra-precision roundness measuring instrument; and through three measurements of a circumferential signal containing different system components, any one of the roundness error of a tested part, the radial rotation error of the spindle of the ultra-precision roundness measuring instrument and the radial rotation error of the error separation turntable is separated. Compared with the most widely used multi-step method, the method solves a problem completely in the airspace, does not involve the Fourier transform, completely avoids harmonic suppression, has the advantage of simple measurement and calculation process, prevents model errors, and provides a new idea for ultra-precision roundness error separation.

Description

technical field [0001] The invention is based on a synchronous movement type roundness error separation device and method, belonging to the technical field of precision instrument manufacturing and measurement. Background technique [0002] In recent years, the continuous development of the field of ultra-precision machining has directly led to the lack of corresponding testing equipment for the processing accuracy of many processing equipment, so that the processing accuracy cannot be further improved. Taking roundness as an example, the roundness error of modern astronomical telescopes has reached ±5nm, the roundness of gyroscopes on spaceships is required to be less than 10nm, and the roundness error of any cross-section of silicon crystal balls with high-precision density references has reached within 10nm. The radial rotation error of the instrument spindle of the highest-precision roundness measuring instrument is also about ±10nm, which makes it impossible to measure ...

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Problems solved by technology

But the disadvantages are also obvious. For example, the increase in the number of sensors will lead to inconsistent characteristics of each sensor, the layout of the sensors is not on the same measurement section, and there are problems such as zero points in the transfer function.

[0008] The problems in the above method are: 1. The signal is transformed into the frequency domain by Fourier transform for error separation, and the spectrum information of the separated signal is obtained, and then the inverse Fourier transform is performed to finally obtain the separated signal. The calculation is complicated and has Truncation and rounding errors; 2. Due to the use of Fourier transform, there is a problem of harmonic suppression in the separated signal, and there is a principle error in the model. The corresponding improvement method can only solve the problem of no harmonic suppression in a certain range, and cannot achieve full There is no harmonic suppression in the band; 3. The roundness error of the measured piece, the radial rotation error of the spindle of the ultra-precision roundness measuring instrument and the radial rotation error of the error separation turntable cannot be separated at the same time

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