Nano-floating-gate-based organic field effect transistor memory and preparation method thereof
A memory and transistor technology, which is applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve problems such as complex process and low storage density, and achieve simplified manufacturing process, long-term maintenance characteristics and tolerance, and reduced cost effect
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[0037] The structure diagram of the organic field effect transistor memory involved in the specific embodiment of the present invention is as follows: figure 1 As shown, an OFET memory with a small molecular nanofilm as a charge trapping layer includes a substrate, a gate electrode formed on the substrate, and a gate insulating layer covering the gate electrode from bottom to top. The small molecule naphthalene ring nanometer floating gate layer on the gate insulating layer, the semiconductor layer formed on the floating gate layer and the source and drain electrodes formed on both sides of the channel region on the upper surface of the semiconductor layer.
[0038] In the technical scheme of the embodiment of the present invention, n-type heavily doped silicon is used as the gate; 300nm thick SiO is thermally evaporated on it 2 As a gate insulating layer; the charge trapping layer is made of 5-methoxy 1,2,3,4-tetraphenylnaphthalene (5-MOT) and polystyrene (PS) at a molar rati...
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