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Nano-floating-gate-based organic field effect transistor memory and preparation method thereof

A memory and transistor technology, which is applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve problems such as complex process and low storage density, and achieve simplified manufacturing process, long-term maintenance characteristics and tolerance, and reduced cost effect

Active Publication Date: 2018-05-18
NANJING UNIV OF POSTS & TELECOMM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In view of the technical problems existing in the existing organic field effect transistors, the present invention proposes a co-suspension coating of an easily soluble small molecule material with excellent charge trapping ability and a hydrophobic high dielectric constant compound polystyrene (PS) into a A small molecule nano-floating gate organic field-effect transistor memory, which solves the problems of low storage density and complex process of general nano-floating gates, and the manufacturing process is simple and can be precisely controlled, which effectively promotes the application range of small molecule materials in storage

Method used

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  • Nano-floating-gate-based organic field effect transistor memory and preparation method thereof
  • Nano-floating-gate-based organic field effect transistor memory and preparation method thereof
  • Nano-floating-gate-based organic field effect transistor memory and preparation method thereof

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Embodiment 1

[0037] The structure diagram of the organic field effect transistor memory involved in the specific embodiment of the present invention is as follows: figure 1 As shown, an OFET memory with a small molecular nanofilm as a charge trapping layer includes a substrate, a gate electrode formed on the substrate, and a gate insulating layer covering the gate electrode from bottom to top. The small molecule naphthalene ring nanometer floating gate layer on the gate insulating layer, the semiconductor layer formed on the floating gate layer and the source and drain electrodes formed on both sides of the channel region on the upper surface of the semiconductor layer.

[0038] In the technical scheme of the embodiment of the present invention, n-type heavily doped silicon is used as the gate; 300nm thick SiO is thermally evaporated on it 2 As a gate insulating layer; the charge trapping layer is made of 5-methoxy 1,2,3,4-tetraphenylnaphthalene (5-MOT) and polystyrene (PS) at a molar rati...

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Abstract

The invention relates to a nano-floating-gate-based organic field effect transistor memory. The nano-floating-gate-based organic field effect transistor memory is a floating gate-tunneling layer integrated device structure. The nano-floating-gate-based organic field effect transistor memory includes source-drain electrodes, a semiconductor layer, a floating gate-tunneling layer and a gate insulating layer; and a floating gate layer and a tunneling layer together form a charge storage layer. The present invention aims to form a nanostructure by using a simple solution suspension coating processto avoid the application of complicated nanotechnology to prepare a thin film. The nano-floating-gate-based organic field effect transistor memory of the invention has the advantages of large storagewindow, high switching ratio (10<5>), high stability and repeated erase resistance and lower cost, and can realize optical erasure so as to facilitate information encryption and can be commercially popularized and produced in a large scale.

Description

technical field [0001] The invention belongs to the technical field of semiconductor memory, and in particular relates to a naphthalene ring small molecule nanometer floating gate organic field effect transistor memory and a preparation method thereof. Background technique [0002] With the advent of the era of big data, in the face of massive information processing and storage, it is required to develop large-capacity, high-density, high-speed non-volatile memory. Compared with traditional inorganic semiconductor memory devices, memory based on organic semiconductors has incomparable advantages. Conventional inorganic semiconductors do not have advantages due to the wide range of sources of organic materials, solution processing, low cost, large-area low-temperature preparation, and integration with flexible substrates. Organic field-effect transistors have the advantages of non-destructive reading and easy logic circuit integration, which are suitable for the development ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/11517H01L27/28H01L51/05H01L51/30H10B41/00
CPCH10B41/00H10K19/10H10K85/60H10K10/462H10K10/466
Inventor 宋娟徐新水钱妍仪明东谢令海黄维
Owner NANJING UNIV OF POSTS & TELECOMM
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