A fractal manganese-copper film ultra-high pressure sensor
An ultra-high pressure, manganin-copper technology is applied in the measurement of the property force of the piezoelectric resistance material and the measurement of the fluid pressure by changing the ohmic resistance. Problems such as high pressure and small resistance value can avoid calculation errors, high precision and large output signal
Active Publication Date: 2020-09-01
XI AN JIAOTONG UNIV
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Problems solved by technology
Most of the existing manganese-copper sensors have large sensitive element sizes, which are not suitable for the measurement of micro-scale detonation pressure; those with small sensitive elements have small resistance values, which are not suitable for measurement The low-pressure section of ultra-high pressure; and the substrate of some manganese-copper sensors is made of inorganic materials, which will cause certain errors when calculating the explosion pressure with the impedance matching method
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[0016] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0017] refer to figure 1 , figure 2 with image 3 , a fractal manganese-copper film ultra-high pressure sensor, including a substrate 2, a sensitive element 4 and an electrode 1 are sputtered on the substrate 2 through MEMS technology, and the input end and output end of the sensitive element 4 are respectively connected to two electrodes 1. A layer of organic insulating film 3 is pasted on the surface of the element 4 and the electrode 1; the sensitive element 4 has a self-similar fractal structure, which is formed by sputtering a manganese-copper target, and can contain larger Resistance value, thereby generating a higher output signal, making the fractal manganese-copper film ultra-high pressure sensor suitable for measuring the low-pressure section of ultra-high pressure; the area occupied by the sensitive element 4 is within the circular range...
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Abstract
The invention relates to a fractal type manganese-copper-film ultra-high pressure sensor comprising a substrate. A sensitive element and electrodes are formed on the substrate in a sputtering manner by an MEMS technology. Each of the input terminal and the output terminal of the sensitive element is connected with two electrodes. An organic insulating film is pasted on the surfaces of the sensitive element and the electrodes. The sensitive element has a self-similar fractal structure and is formed by using a manganese-copper target material in a sputtering manner. The substrate is made of an organic glass material. The organic insulating film is made from Teflon or polyimide. According to the invention, the fractal type manganese-copper-film ultra-high pressure sensor has characteristics of high precision, fast speed, large output signal, and high adaptability to small-scale detonation pressure measurement and the like; and the test precision can reach to about 3%. The sensor is suitable for measurement of the ultra-high pressure generated by the micro-scale detonation or impact within the range of 1 to 50Gpa.
Description
technical field [0001] The invention belongs to the technical field of ultra-high pressure sensors, and in particular relates to a fractional manganese-copper film ultra-high pressure sensor. Background technique [0002] Manganese copper is a conventional ternary alloy material, the main components are copper 83-87%, manganese 11-13%, nickel 2-4%. Since the piezoresistive effect was first discovered on this material in 1903, it has been widely used in the measurement of static pressure. Until the 1960s, Fuller and Price, Bernstein and Keough took the lead in applying the manganin sensor to the test of dynamic high voltage. Years of research have shown that although the piezoresistive coefficient of manganese-copper alloy is not high, it is very suitable for making ultra-high pressure sensors due to its advantages of high sensitivity, fast response, good linearity, and small temperature coefficient of resistance. Its effective range can reach tens of GPa, and it is current...
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IPC IPC(8): G01L1/18G01L9/04
CPCG01L1/18G01L9/04
Inventor 赵玉龙张国栋赵云韦学勇王馨晨赵友张琪任炜李慧
Owner XI AN JIAOTONG UNIV