An automatic loading and unloading and automatic film turning system and its working method

A technology of automatic loading and unloading, which is applied in the direction of sustainable manufacturing/processing, final product manufacturing, transportation and packaging, etc., to achieve the effects of overcoming adverse effects, obvious economic benefits, and obvious economic effects

Active Publication Date: 2021-03-02
IDEAL ENERGY (SHANGHAI) SUNFLOWER THIN FILM EQUIPMENT LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The very short process time makes it possible to increase the industrial production capacity, but this requires that the time consumption of other steps of the battery must be well matched with the process time
At this time, the time spent waiting for cooling down as mentioned in the previous paragraph obviously becomes the bottleneck for increasing production capacity

Method used

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  • An automatic loading and unloading and automatic film turning system and its working method
  • An automatic loading and unloading and automatic film turning system and its working method
  • An automatic loading and unloading and automatic film turning system and its working method

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Embodiment Construction

[0033] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0034] In the following description, many specific details are set forth in order to fully understand the present invention, but the present invention can also be implemented by other methods different from those described here, so the present invention is not limited by the specific embodiments disclosed below.

[0035] figure 1 Shown is a schematic structural view of the PECVD process section of the double-sided heterojunction solar cell production line in an embodiment of the present invention, which involves the first PECVD equipment 100, the second PECVD equipment 200, automatic loading and unloading and automatic flipping system. The automatic loading and unloading and automatic film turning system includes a nitrogen room 500 ,...

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Abstract

The invention provides an automatic loading and unloading and automatic film turning system and its working method. The seamless connection between the system and PECVD equipment is the loading and unloading process of PECVD equipment for double-sided heterojunction solar cells and the connection between two PECVD systems. The automatic flipping process provides a working environment with high cleanliness, low humidity, and low oxygen content, which solves the difficulty that the production capacity and cell conversion efficiency cannot be balanced at the same time during the preparation of double-sided heterojunction solar cells.

Description

Technical field: [0001] The invention relates to the field of mass-production PECVD equipment for preparing thin film / crystalline silicon heterojunction solar cells, in particular to an automatic loading and unloading and automatic sheet turning system and its working method. Background technique: [0002] Thin-film / crystalline silicon heterojunction solar cells (hereinafter referred to as heterojunction solar cells) belong to the third generation of high-efficiency solar cell technology, which combines the advantages of the first-generation Low coefficient and other characteristics, especially the conversion efficiency of double-sided heterojunction solar cells can reach more than 26%, which has broad market prospects. [0003] In the PECVD process section of preparing double-sided heterojunction solar cells, in order to avoid cross-contamination, two PECVD equipment are required, one for the I / N coating on one side of the silicon wafer, and the other for the I / N coating on...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L31/0747H01L21/67H01L21/677
CPCH01L21/67011H01L21/6776H01L31/0747H01L31/1804H01L31/1876Y02E10/547Y02P70/50
Inventor 曹阳陈金元周松涛陈力兵诸迎军谭晓华胡宏逵
Owner IDEAL ENERGY (SHANGHAI) SUNFLOWER THIN FILM EQUIPMENT LTD
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