Preparation method of molybdenum-niobium target blank

A manufacturing method and technology of target blanks, which are applied in the field of target sputtering, can solve the problems that the performance of molybdenum-niobium target blanks needs to be improved, and achieve the effect of uniform microstructure

Inactive Publication Date: 2018-06-01
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the performance of the molybdenum-niobium target blank formed by the existing technology needs to be improved

Method used

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  • Preparation method of molybdenum-niobium target blank
  • Preparation method of molybdenum-niobium target blank
  • Preparation method of molybdenum-niobium target blank

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Embodiment Construction

[0035] It can be known from the background technology that the performance of the molybdenum-niobium target blank formed by the prior art needs to be improved. The reasons are:

[0036] At present, most of the domestic molybdenum-niobium alloy sintering process stays in the sample experiment stage, and industrial production has not yet been realized. However, when large-scale production of molybdenum-niobium alloys, the current formed molybdenum-niobium alloys have high hardness and are prone to cracks, which makes it difficult for the formed molybdenum-niobium alloys to meet the requirements of semiconductor, solar, LCD and other industries. Therefore, there is an urgent need to provide a sintering process for large-scale production of molybdenum-niobium alloys to ensure the formation of large-scale samples, so that the formed molybdenum-niobium target blanks can meet the performance requirements of sputtering targets.

[0037] In order to solve the above problems, the present in...

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Abstract

The invention provides a preparation method of a molybdenum-niobium target blank. The method comprises steps as follows: molybdenum and niobium mixed powder is provided; after the molybdenum and niobium mixed powder is put into a mold, the molybdenum and niobium mixed powder is treated with a hot-pressing sintering process, and a molybdenum-niobium alloy is formed; the molybdenum-niobium alloy istaken out of the mold, and the molybdenum-niobium target blank is obtained. After the molybdenum and niobium mixed powder is put into the mold, the molybdenum and niobium mixed powder is treated withthe hot-pressing sintering process, and the molybdenum-niobium alloy is formed; the molybdenum-niobium target blank is obtained after the molybdenum-niobium alloy is taken out of the mold. By means ofthe scheme, the molybdenum-niobium target blank preparation method applicable to large-scale industrial production can be provided, so that the large-size molybdenum-niobium target blank can be formed, the compactness of the formed molybdenum-niobium target blank reaches 99% or above, and the molybdenum-niobium target blank having a uniform microstructure and meeting the performance requirement of a sputtering target material is obtained.

Description

Technical field [0001] The invention relates to the field of target sputtering, in particular to a method for manufacturing a molybdenum-niobium target blank. Background technique [0002] Sputtering technology is one of the common processes in the field of target sputtering. With the increasing development of sputtering technology, sputtering targets play an increasingly important role in sputtering technology. The sputtering target is mainly composed of a target blank and a backing plate. The quality of the target blank directly affects the film-forming quality of the sputtering target. [0003] Molybdenum-niobium alloy is currently the more commonly used target material. The refractory metal molybdenum-niobium alloy has the characteristics of high hardness and stable performance. It is a very good wear-resistant material and heat-conducting material. The molybdenum-niobium alloy can maintain stable performance in high temperature environments and also has good corrosion resista...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C14/14C22C27/04C22C1/04B22F3/04B22F3/15
CPCB22F3/04B22F3/15C22C1/045C22C27/04C23C14/14C23C14/3414
Inventor 姚力军潘杰相原俊夫王学泽段高林
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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